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- W2060787066 abstract "The adsorption of oxygen on thermally cleaned (111) silicon surfaces has been investigated by Auger electron spectroscopy, with mass spectrometric monitoring of the gas phase composition. The initial sticking coefficient has been measured, and a value of ~ 8 × 10−4 found, which is independent of pressure over the range 10−5−10−8 torr. The functional dependence of the sticking coefficient on coverage has been determined, and a model of the adsorption kinetics is suggested. Particular attention is paid to the influence of CO, which is formed in varying quantities from interaction of the oxygen with filaments and ion pumps in the vacuum system. The Auger spectra from silicon surfaces with various coverages of adsorbed oxygen are compared with those from surfaces which have been oxidised in-situ at elevated temperatures, and very significant differences observed." @default.
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- W2060787066 date "1971-10-01" @default.
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- W2060787066 title "An investigation of silicon-oxygen interactions using Auger electron spectroscopy" @default.
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- W2060787066 doi "https://doi.org/10.1016/0039-6028(71)90184-1" @default.
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