FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2060818046> ?p ?o ?g. }

• W2060818046 endingPage "687" @default.
• W2060818046 startingPage "685" @default.
• W2060818046 abstract "We describe a new low-temperature clean for Si molecular beam epitaxy. Growth is carried out on Si wafers subjected to an ≊10–60 s clean in a buffered HF solution prior to insertion in the growth chamber. We demonstrate low defect densities (&lt;105 cm−2) at 380 °C without either the conventional high-temperature cleaning step to desorb a chemical oxide or the use of a glovebox for chemical cleaning and transfer to the vacuum chamber. Wafers are given an ≊200 °C prebake in situ to remove hydrocarbons, and then raised to the growth temperature prior to deposition. For (100) substrates the transition from amorphous deposition to crystalline growth occurs at ≊370 °C, below the temperature at which hydrogen should desorb. On (111) the minimum temperature for epitaxy is ≊500 °C, as expected. We attribute this difference to the large number of undercoordinated Si atoms present on (100), which allows growth to take place even on the hydrogen-terminated surface. Secondary-ion mass spectrometry suggests that contamination levels at the substrate-epilayer interface using this HF dip are comparable to those for conventional (‘‘Shiraki’’) chemical oxide desorption techniques. Omission of the prebake step leads to a highly carbon-contaminated surface: this surface has the remarkable property that Si will grow epitaxially on it, but does not wet it (so that at high temperature Si/Si:C grows as islands)." @default.
• W2060818046 created "2016-06-24" @default.
• W2060818046 creator A5043874858 @default.
• W2060818046 creator A5074420828 @default.
• W2060818046 creator A5089832446 @default.
• W2060818046 date "1991-08-05" @default.
• W2060818046 modified "2023-09-24" @default.
• W2060818046 title "370 °C clean for Si molecular beam epitaxy using a HF dip" @default.
• W2060818046 cites W1963887314 @default.
• W2060818046 cites W1977419538 @default.
• W2060818046 cites W1989980133 @default.
• W2060818046 cites W1990372417 @default.
• W2060818046 cites W1999920717 @default.
• W2060818046 cites W2013882891 @default.
• W2060818046 cites W2023624691 @default.
• W2060818046 cites W2031393052 @default.
• W2060818046 cites W2043590019 @default.
• W2060818046 cites W2050737454 @default.
• W2060818046 cites W2061613400 @default.
• W2060818046 cites W2062076539 @default.
• W2060818046 cites W2063140846 @default.
• W2060818046 cites W2086850041 @default.
• W2060818046 cites W2322267356 @default.
• W2060818046 doi "https://doi.org/10.1063/1.105365" @default.
• W2060818046 hasPublicationYear "1991" @default.
• W2060818046 type Work @default.
• W2060818046 sameAs 2060818046 @default.
• W2060818046 citedByCount "81" @default.
• W2060818046 countsByYear W20608180462012 @default.
• W2060818046 countsByYear W20608180462013 @default.
• W2060818046 countsByYear W20608180462015 @default.
• W2060818046 countsByYear W20608180462018 @default.
• W2060818046 countsByYear W20608180462019 @default.
• W2060818046 countsByYear W20608180462020 @default.
• W2060818046 crossrefType "journal-article" @default.
• W2060818046 hasAuthorship W2060818046A5043874858 @default.
• W2060818046 hasAuthorship W2060818046A5074420828 @default.
• W2060818046 hasAuthorship W2060818046A5089832446 @default.
• W2060818046 hasConcept C110738630 @default.
• W2060818046 hasConcept C111368507 @default.
• W2060818046 hasConcept C113196181 @default.
• W2060818046 hasConcept C127313418 @default.
• W2060818046 hasConcept C147789679 @default.
• W2060818046 hasConcept C150394285 @default.
• W2060818046 hasConcept C160671074 @default.
• W2060818046 hasConcept C162711632 @default.
• W2060818046 hasConcept C171250308 @default.
• W2060818046 hasConcept C178790620 @default.
• W2060818046 hasConcept C185592680 @default.
• W2060818046 hasConcept C192562407 @default.
• W2060818046 hasConcept C2777289219 @default.
• W2060818046 hasConcept C2779227376 @default.
• W2060818046 hasConcept C2779851234 @default.
• W2060818046 hasConcept C3792809 @default.
• W2060818046 hasConcept C49040817 @default.
• W2060818046 hasConcept C512968161 @default.
• W2060818046 hasConcept C5379308 @default.
• W2060818046 hasConcept C544956773 @default.
• W2060818046 hasConcept C56052488 @default.
• W2060818046 hasConcept C57410435 @default.
• W2060818046 hasConcept C8010536 @default.
• W2060818046 hasConceptScore W2060818046C110738630 @default.
• W2060818046 hasConceptScore W2060818046C111368507 @default.
• W2060818046 hasConceptScore W2060818046C113196181 @default.
• W2060818046 hasConceptScore W2060818046C127313418 @default.
• W2060818046 hasConceptScore W2060818046C147789679 @default.
• W2060818046 hasConceptScore W2060818046C150394285 @default.
• W2060818046 hasConceptScore W2060818046C160671074 @default.
• W2060818046 hasConceptScore W2060818046C162711632 @default.
• W2060818046 hasConceptScore W2060818046C171250308 @default.
• W2060818046 hasConceptScore W2060818046C178790620 @default.
• W2060818046 hasConceptScore W2060818046C185592680 @default.
• W2060818046 hasConceptScore W2060818046C192562407 @default.
• W2060818046 hasConceptScore W2060818046C2777289219 @default.
• W2060818046 hasConceptScore W2060818046C2779227376 @default.
• W2060818046 hasConceptScore W2060818046C2779851234 @default.
• W2060818046 hasConceptScore W2060818046C3792809 @default.
• W2060818046 hasConceptScore W2060818046C49040817 @default.
• W2060818046 hasConceptScore W2060818046C512968161 @default.
• W2060818046 hasConceptScore W2060818046C5379308 @default.
• W2060818046 hasConceptScore W2060818046C544956773 @default.
• W2060818046 hasConceptScore W2060818046C56052488 @default.
• W2060818046 hasConceptScore W2060818046C57410435 @default.
• W2060818046 hasConceptScore W2060818046C8010536 @default.
• W2060818046 hasIssue "6" @default.
• W2060818046 hasLocation W20608180461 @default.
• W2060818046 hasOpenAccess W2060818046 @default.
• W2060818046 hasPrimaryLocation W20608180461 @default.
• W2060818046 hasRelatedWork W1983443762 @default.
• W2060818046 hasRelatedWork W2009115647 @default.
• W2060818046 hasRelatedWork W2013557620 @default.
• W2060818046 hasRelatedWork W2017487541 @default.
• W2060818046 hasRelatedWork W2031003934 @default.
• W2060818046 hasRelatedWork W2051282847 @default.
• W2060818046 hasRelatedWork W2067662551 @default.
• W2060818046 hasRelatedWork W2150512723 @default.
• W2060818046 hasRelatedWork W2346882948 @default.
• W2060818046 hasRelatedWork W2946454824 @default.

• next