Matches in SemOpenAlex for { <https://semopenalex.org/work/W2060819278> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W2060819278 abstract "Design and implementation of a multifunctional 'golden standard' wafer which facilitates easy and rapid measurement of the most important optical stepper parameters using commercially available metrology tools and software are described. In this design a stepped array of reference marks is permanently etched into a silicon oxide film on a silicon wafer. The most important feature of this method is that a permanently etched pattern is used as a reference standard, which may be used to compare a number of steppers over a period of time. When it is required to perform a distortion measurement the wafer is simply coated with photoresist and a series of full-field exposures are exposed on the stepper to be measured. Using this method, the errors due to individual stepper stages are removed since each lens distortion measurement is made with respect to a common grid pattern. Furthermore this method provides useful information regarding the accuracy of the stepper alignment system. In addition the permanent alignment marks on the wafer permit the measurement of individual stepper stage matching, as well as stage orthogonality errors." @default.
- W2060819278 created "2016-06-24" @default.
- W2060819278 creator A5007681040 @default.
- W2060819278 creator A5011624611 @default.
- W2060819278 creator A5019091215 @default.
- W2060819278 creator A5061800136 @default.
- W2060819278 date "1991-07-01" @default.
- W2060819278 modified "2023-09-23" @default.
- W2060819278 title "Golden standard wafer design for optical stepper characterization" @default.
- W2060819278 doi "https://doi.org/10.1117/12.44440" @default.
- W2060819278 hasPublicationYear "1991" @default.
- W2060819278 type Work @default.
- W2060819278 sameAs 2060819278 @default.
- W2060819278 citedByCount "0" @default.
- W2060819278 crossrefType "proceedings-article" @default.
- W2060819278 hasAuthorship W2060819278A5007681040 @default.
- W2060819278 hasAuthorship W2060819278A5011624611 @default.
- W2060819278 hasAuthorship W2060819278A5019091215 @default.
- W2060819278 hasAuthorship W2060819278A5061800136 @default.
- W2060819278 hasConcept C100460472 @default.
- W2060819278 hasConcept C119599485 @default.
- W2060819278 hasConcept C120665830 @default.
- W2060819278 hasConcept C121332964 @default.
- W2060819278 hasConcept C126780896 @default.
- W2060819278 hasConcept C127413603 @default.
- W2060819278 hasConcept C134406635 @default.
- W2060819278 hasConcept C160671074 @default.
- W2060819278 hasConcept C171250308 @default.
- W2060819278 hasConcept C187504802 @default.
- W2060819278 hasConcept C192562407 @default.
- W2060819278 hasConcept C194257627 @default.
- W2060819278 hasConcept C195766429 @default.
- W2060819278 hasConcept C199360897 @default.
- W2060819278 hasConcept C199639397 @default.
- W2060819278 hasConcept C24326235 @default.
- W2060819278 hasConcept C2777904410 @default.
- W2060819278 hasConcept C2779227376 @default.
- W2060819278 hasConcept C41008148 @default.
- W2060819278 hasConcept C46362747 @default.
- W2060819278 hasConceptScore W2060819278C100460472 @default.
- W2060819278 hasConceptScore W2060819278C119599485 @default.
- W2060819278 hasConceptScore W2060819278C120665830 @default.
- W2060819278 hasConceptScore W2060819278C121332964 @default.
- W2060819278 hasConceptScore W2060819278C126780896 @default.
- W2060819278 hasConceptScore W2060819278C127413603 @default.
- W2060819278 hasConceptScore W2060819278C134406635 @default.
- W2060819278 hasConceptScore W2060819278C160671074 @default.
- W2060819278 hasConceptScore W2060819278C171250308 @default.
- W2060819278 hasConceptScore W2060819278C187504802 @default.
- W2060819278 hasConceptScore W2060819278C192562407 @default.
- W2060819278 hasConceptScore W2060819278C194257627 @default.
- W2060819278 hasConceptScore W2060819278C195766429 @default.
- W2060819278 hasConceptScore W2060819278C199360897 @default.
- W2060819278 hasConceptScore W2060819278C199639397 @default.
- W2060819278 hasConceptScore W2060819278C24326235 @default.
- W2060819278 hasConceptScore W2060819278C2777904410 @default.
- W2060819278 hasConceptScore W2060819278C2779227376 @default.
- W2060819278 hasConceptScore W2060819278C41008148 @default.
- W2060819278 hasConceptScore W2060819278C46362747 @default.
- W2060819278 hasLocation W20608192781 @default.
- W2060819278 hasOpenAccess W2060819278 @default.
- W2060819278 hasPrimaryLocation W20608192781 @default.
- W2060819278 hasRelatedWork W1972165255 @default.
- W2060819278 hasRelatedWork W1982898944 @default.
- W2060819278 hasRelatedWork W1987459211 @default.
- W2060819278 hasRelatedWork W2001696771 @default.
- W2060819278 hasRelatedWork W2016104189 @default.
- W2060819278 hasRelatedWork W2018678484 @default.
- W2060819278 hasRelatedWork W2030298991 @default.
- W2060819278 hasRelatedWork W2042292989 @default.
- W2060819278 hasRelatedWork W2064568281 @default.
- W2060819278 hasRelatedWork W2071614033 @default.
- W2060819278 hasRelatedWork W2072107710 @default.
- W2060819278 hasRelatedWork W2076413732 @default.
- W2060819278 hasRelatedWork W2080394468 @default.
- W2060819278 hasRelatedWork W2093637697 @default.
- W2060819278 hasRelatedWork W1514465928 @default.
- W2060819278 hasRelatedWork W1581731703 @default.
- W2060819278 hasRelatedWork W1871475497 @default.
- W2060819278 hasRelatedWork W1933224822 @default.
- W2060819278 hasRelatedWork W2089031643 @default.
- W2060819278 hasRelatedWork W979269649 @default.
- W2060819278 isParatext "false" @default.
- W2060819278 isRetracted "false" @default.
- W2060819278 magId "2060819278" @default.
- W2060819278 workType "article" @default.