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- W2060842261 abstract "This paper investigates the structural and electrical properties of TiN films prepared by metalorganic chemical vapor deposition (MOCVD) using a mixture of tetradimethylamino-titanium (Ti(N(CH 3 ) 2 ) 4 ) and NH 3 gases. The deposited films changed from a metallic gray to a gold color at a substrate temperature of 300∼580°C. The film resistivity decreases with increasing substrate temperature to 8.4×10 2 µΩ·cm at 580°C. The preferred orientation was (111) at temperatures over 400°C." @default.
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- W2060842261 date "1990-10-01" @default.
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- W2060842261 title "Characterization of CVD-TiN Films Prepared with Metalorganic Source" @default.
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- W2060842261 doi "https://doi.org/10.1143/jjap.29.2103" @default.
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