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• W2060935797 endingPage "296" @default.
• W2060935797 startingPage "292" @default.
• W2060935797 abstract "Light emitting diodes become brighter because of the contribution of patterned sapphire substrates (PSS). The dimensions of PSS crucially affect its performance. The most suitable instrument to measure PSS is atomic force microscope, which provides three-dimensional surface profiles. This paper proposes an automatic method to analyze AFM-collected raw data and produce characteristic parameters of PSS, including height, diameters, pitch, and side angles. Experimental results show that this method has good repeatability of 1.2 and 6.3 nm on measuring height and bottom diameter, respectively. This nanometrology method will be extensively applicable for similar nanostructures with periodic patterns." @default.
• W2060935797 created "2016-06-24" @default.
• W2060935797 creator A5001668908 @default.
• W2060935797 creator A5005348783 @default.
• W2060935797 creator A5015371172 @default.
• W2060935797 date "2015-03-01" @default.
• W2060935797 modified "2023-10-16" @default.
• W2060935797 title "Automatic-Patterned Sapphire Substrate Nanometrology Using Atomic Force Microscope" @default.
• W2060935797 cites W1966379633 @default.
• W2060935797 cites W1967764736 @default.
• W2060935797 cites W1970965170 @default.
• W2060935797 cites W1971882273 @default.
• W2060935797 cites W2010852631 @default.
• W2060935797 cites W2013468778 @default.
• W2060935797 cites W2016339727 @default.
• W2060935797 cites W2024991751 @default.
• W2060935797 cites W2035162942 @default.
• W2060935797 cites W2055775564 @default.
• W2060935797 cites W2062047511 @default.
• W2060935797 cites W2068655364 @default.
• W2060935797 cites W2073453103 @default.
• W2060935797 cites W2103162133 @default.
• W2060935797 cites W2111380101 @default.
• W2060935797 cites W2136372189 @default.
• W2060935797 cites W2136758959 @default.
• W2060935797 cites W2140023431 @default.
• W2060935797 cites W2145956034 @default.
• W2060935797 cites W2167273601 @default.
• W2060935797 cites W3150248096 @default.
• W2060935797 cites W4256290703 @default.
• W2060935797 cites W2064723557 @default.
• W2060935797 doi "https://doi.org/10.1109/tnano.2015.2392128" @default.
• W2060935797 hasPublicationYear "2015" @default.
• W2060935797 type Work @default.
• W2060935797 sameAs 2060935797 @default.
• W2060935797 citedByCount "4" @default.
• W2060935797 countsByYear W20609357972015 @default.
• W2060935797 countsByYear W20609357972017 @default.
• W2060935797 countsByYear W20609357972018 @default.
• W2060935797 countsByYear W20609357972021 @default.
• W2060935797 crossrefType "journal-article" @default.
• W2060935797 hasAuthorship W2060935797A5001668908 @default.
• W2060935797 hasAuthorship W2060935797A5005348783 @default.
• W2060935797 hasAuthorship W2060935797A5015371172 @default.
• W2060935797 hasConcept C102951782 @default.
• W2060935797 hasConcept C111368507 @default.
• W2060935797 hasConcept C120665830 @default.
• W2060935797 hasConcept C121332964 @default.
• W2060935797 hasConcept C127313418 @default.
• W2060935797 hasConcept C148402106 @default.
• W2060935797 hasConcept C154020017 @default.
• W2060935797 hasConcept C159985019 @default.
• W2060935797 hasConcept C164086593 @default.
• W2060935797 hasConcept C171250308 @default.
• W2060935797 hasConcept C185592680 @default.
• W2060935797 hasConcept C186187911 @default.
• W2060935797 hasConcept C192562407 @default.
• W2060935797 hasConcept C24890656 @default.
• W2060935797 hasConcept C2777289219 @default.
• W2060935797 hasConcept C2780064504 @default.
• W2060935797 hasConcept C43617362 @default.
• W2060935797 hasConcept C49040817 @default.
• W2060935797 hasConcept C520434653 @default.
• W2060935797 hasConcept C67649825 @default.
• W2060935797 hasConcept C71039073 @default.
• W2060935797 hasConcept C78434282 @default.
• W2060935797 hasConcept C79261456 @default.
• W2060935797 hasConceptScore W2060935797C102951782 @default.
• W2060935797 hasConceptScore W2060935797C111368507 @default.
• W2060935797 hasConceptScore W2060935797C120665830 @default.
• W2060935797 hasConceptScore W2060935797C121332964 @default.
• W2060935797 hasConceptScore W2060935797C127313418 @default.
• W2060935797 hasConceptScore W2060935797C148402106 @default.
• W2060935797 hasConceptScore W2060935797C154020017 @default.
• W2060935797 hasConceptScore W2060935797C159985019 @default.
• W2060935797 hasConceptScore W2060935797C164086593 @default.
• W2060935797 hasConceptScore W2060935797C171250308 @default.
• W2060935797 hasConceptScore W2060935797C185592680 @default.
• W2060935797 hasConceptScore W2060935797C186187911 @default.
• W2060935797 hasConceptScore W2060935797C192562407 @default.
• W2060935797 hasConceptScore W2060935797C24890656 @default.
• W2060935797 hasConceptScore W2060935797C2777289219 @default.
• W2060935797 hasConceptScore W2060935797C2780064504 @default.
• W2060935797 hasConceptScore W2060935797C43617362 @default.
• W2060935797 hasConceptScore W2060935797C49040817 @default.
• W2060935797 hasConceptScore W2060935797C520434653 @default.
• W2060935797 hasConceptScore W2060935797C67649825 @default.
• W2060935797 hasConceptScore W2060935797C71039073 @default.
• W2060935797 hasConceptScore W2060935797C78434282 @default.
• W2060935797 hasConceptScore W2060935797C79261456 @default.
• W2060935797 hasFunder F4320321040 @default.
• W2060935797 hasIssue "2" @default.
• W2060935797 hasLocation W20609357971 @default.
• W2060935797 hasOpenAccess W2060935797 @default.
• W2060935797 hasPrimaryLocation W20609357971 @default.
• W2060935797 hasRelatedWork W138014004 @default.
• W2060935797 hasRelatedWork W158643779 @default.
• W2060935797 hasRelatedWork W1966848192 @default.

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