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• W2061069653 abstract "A hydrogen sensor based on a silicon Metal/Solid Electrolyte/Insulator/Semiconductor (MEIS) structure with thin layers of the super-ionic conductor LaF3 and Pd gate metal was investigated in a hybrid structure on a resistance heater mounted on a ceramic substrate. The sensor was operated at room temperature, however, a short heating impulse once a day ensures a fast and reproducible dynamic behavior. The sensor was characterized in the concentration range typical for alarm levels up to 40% of the lower flammability limit and shows a logarithmic dependency of the sensor signal from the hydrogen concentration and a mean sensitivity of about 140 mV/decade. The response time (t90) is about 8 s. In a long term test for a period of three month, the sensor was exposed to hydrogen every two weeks. The sensor signal was shown to be stable in dynamic behavior, sensitivity and signal difference." @default.
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• W2061069653 date "2013-10-01" @default.
• W2061069653 modified "2023-10-04" @default.
• W2061069653 title "Long-term stability of a MEIS low energy hydrogen sensor" @default.
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• W2061069653 doi "https://doi.org/10.1016/j.snb.2012.12.081" @default.
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