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- W2061103674 abstract "Long-term reliability of MEMS devices is increasingly important for large scale manufactured products. Traditional reliability testing used for microelectronic devices has been applied to integrated MEMS devices with the expectation that acceleration of MEMS-specific failure mechanisms would not be substantial. Rather, traditional package and circuit related failures would be accelerated. In addition, reliability tests that impart mechanical stresses on parts were expected to accelerate failures more so than traditional tests. It was found that while mechanical stresses were more effective in inducing MEMS related failures some traditional reliability tests did accelerate MEMS-related failures." @default.
- W2061103674 created "2016-06-24" @default.
- W2061103674 creator A5007442128 @default.
- W2061103674 creator A5018600286 @default.
- W2061103674 creator A5031951594 @default.
- W2061103674 creator A5089373327 @default.
- W2061103674 date "1999-08-18" @default.
- W2061103674 modified "2023-09-27" @default.
- W2061103674 title "<title>Analysis of manufacturing-scale MEMS reliability testing</title>" @default.
- W2061103674 cites W1829053762 @default.
- W2061103674 cites W2011746725 @default.
- W2061103674 cites W2027174312 @default.
- W2061103674 cites W2138512005 @default.
- W2061103674 cites W125553660 @default.
- W2061103674 doi "https://doi.org/10.1117/12.359367" @default.
- W2061103674 hasPublicationYear "1999" @default.
- W2061103674 type Work @default.
- W2061103674 sameAs 2061103674 @default.
- W2061103674 citedByCount "13" @default.
- W2061103674 countsByYear W20611036742013 @default.
- W2061103674 countsByYear W20611036742016 @default.
- W2061103674 countsByYear W20611036742018 @default.
- W2061103674 crossrefType "proceedings-article" @default.
- W2061103674 hasAuthorship W2061103674A5007442128 @default.
- W2061103674 hasAuthorship W2061103674A5018600286 @default.
- W2061103674 hasAuthorship W2061103674A5031951594 @default.
- W2061103674 hasAuthorship W2061103674A5089373327 @default.
- W2061103674 hasConcept C105795698 @default.
- W2061103674 hasConcept C117896860 @default.
- W2061103674 hasConcept C119599485 @default.
- W2061103674 hasConcept C121332964 @default.
- W2061103674 hasConcept C127413603 @default.
- W2061103674 hasConcept C158379689 @default.
- W2061103674 hasConcept C163258240 @default.
- W2061103674 hasConcept C171250308 @default.
- W2061103674 hasConcept C173291955 @default.
- W2061103674 hasConcept C187937830 @default.
- W2061103674 hasConcept C192562407 @default.
- W2061103674 hasConcept C200601418 @default.
- W2061103674 hasConcept C33923547 @default.
- W2061103674 hasConcept C37977207 @default.
- W2061103674 hasConcept C41008148 @default.
- W2061103674 hasConcept C43214815 @default.
- W2061103674 hasConcept C62520636 @default.
- W2061103674 hasConcept C74650414 @default.
- W2061103674 hasConceptScore W2061103674C105795698 @default.
- W2061103674 hasConceptScore W2061103674C117896860 @default.
- W2061103674 hasConceptScore W2061103674C119599485 @default.
- W2061103674 hasConceptScore W2061103674C121332964 @default.
- W2061103674 hasConceptScore W2061103674C127413603 @default.
- W2061103674 hasConceptScore W2061103674C158379689 @default.
- W2061103674 hasConceptScore W2061103674C163258240 @default.
- W2061103674 hasConceptScore W2061103674C171250308 @default.
- W2061103674 hasConceptScore W2061103674C173291955 @default.
- W2061103674 hasConceptScore W2061103674C187937830 @default.
- W2061103674 hasConceptScore W2061103674C192562407 @default.
- W2061103674 hasConceptScore W2061103674C200601418 @default.
- W2061103674 hasConceptScore W2061103674C33923547 @default.
- W2061103674 hasConceptScore W2061103674C37977207 @default.
- W2061103674 hasConceptScore W2061103674C41008148 @default.
- W2061103674 hasConceptScore W2061103674C43214815 @default.
- W2061103674 hasConceptScore W2061103674C62520636 @default.
- W2061103674 hasConceptScore W2061103674C74650414 @default.
- W2061103674 hasLocation W20611036741 @default.
- W2061103674 hasOpenAccess W2061103674 @default.
- W2061103674 hasPrimaryLocation W20611036741 @default.
- W2061103674 hasRelatedWork W2018620709 @default.
- W2061103674 hasRelatedWork W2061103674 @default.
- W2061103674 hasRelatedWork W2143925077 @default.
- W2061103674 hasRelatedWork W2310389470 @default.
- W2061103674 hasRelatedWork W2350106990 @default.
- W2061103674 hasRelatedWork W2361928877 @default.
- W2061103674 hasRelatedWork W2367688955 @default.
- W2061103674 hasRelatedWork W2380562615 @default.
- W2061103674 hasRelatedWork W2937898963 @default.
- W2061103674 hasRelatedWork W4214946216 @default.
- W2061103674 isParatext "false" @default.
- W2061103674 isRetracted "false" @default.
- W2061103674 magId "2061103674" @default.
- W2061103674 workType "article" @default.