Matches in SemOpenAlex for { <https://semopenalex.org/work/W2061131567> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W2061131567 endingPage "65" @default.
- W2061131567 startingPage "59" @default.
- W2061131567 abstract "This paper reports on the measurement unit of a micromechanical sensor–actuator system for adjustable frequency selective vibration detection in the frequency range below 1 kHz. The sensitivity of the micro-electro-mechanical system (MEMS) is tunable and can reach values up to 400 mV/m s−2. Its spectral resolution without any electronic filtering is 105 Hz. The MEMS itself consists of two force coupled oscillators, which are operated at standard pressure. The superheterodyne principle, well known from information technologies, is then applied to the mechanical domain by the two oscillators. The intelligent silicon system is therefore used to detect the low frequency vibration, transform the vibration signal into a higher frequency range and perform amplification and filtering at a specific, tunable frequency. The analog circuitry is used to pick-off the sensor output signal and demodulate it to the baseband." @default.
- W2061131567 created "2016-06-24" @default.
- W2061131567 creator A5024460849 @default.
- W2061131567 creator A5025136246 @default.
- W2061131567 creator A5044192461 @default.
- W2061131567 creator A5070885421 @default.
- W2061131567 date "2009-11-01" @default.
- W2061131567 modified "2023-10-04" @default.
- W2061131567 title "Measurement unit for tunable low frequency vibration detection with MEMS force coupled oscillators" @default.
- W2061131567 cites W1968479909 @default.
- W2061131567 cites W1985233716 @default.
- W2061131567 cites W2003705200 @default.
- W2061131567 cites W2019300509 @default.
- W2061131567 cites W2036529545 @default.
- W2061131567 cites W2076667857 @default.
- W2061131567 cites W2089285883 @default.
- W2061131567 cites W595650872 @default.
- W2061131567 cites W609199964 @default.
- W2061131567 doi "https://doi.org/10.1016/j.sna.2009.08.028" @default.
- W2061131567 hasPublicationYear "2009" @default.
- W2061131567 type Work @default.
- W2061131567 sameAs 2061131567 @default.
- W2061131567 citedByCount "5" @default.
- W2061131567 countsByYear W20611315672018 @default.
- W2061131567 countsByYear W20611315672019 @default.
- W2061131567 countsByYear W20611315672021 @default.
- W2061131567 crossrefType "journal-article" @default.
- W2061131567 hasAuthorship W2061131567A5024460849 @default.
- W2061131567 hasAuthorship W2061131567A5025136246 @default.
- W2061131567 hasAuthorship W2061131567A5044192461 @default.
- W2061131567 hasAuthorship W2061131567A5070885421 @default.
- W2061131567 hasConcept C119599485 @default.
- W2061131567 hasConcept C121332964 @default.
- W2061131567 hasConcept C127162648 @default.
- W2061131567 hasConcept C127413603 @default.
- W2061131567 hasConcept C19118579 @default.
- W2061131567 hasConcept C192562407 @default.
- W2061131567 hasConcept C195251586 @default.
- W2061131567 hasConcept C198394728 @default.
- W2061131567 hasConcept C199360897 @default.
- W2061131567 hasConcept C21200559 @default.
- W2061131567 hasConcept C24326235 @default.
- W2061131567 hasConcept C24890656 @default.
- W2061131567 hasConcept C2779843651 @default.
- W2061131567 hasConcept C31972630 @default.
- W2061131567 hasConcept C37977207 @default.
- W2061131567 hasConcept C41008148 @default.
- W2061131567 hasConcept C46362747 @default.
- W2061131567 hasConcept C49040817 @default.
- W2061131567 hasConcept C55366258 @default.
- W2061131567 hasConcept C65165936 @default.
- W2061131567 hasConcept C74064498 @default.
- W2061131567 hasConceptScore W2061131567C119599485 @default.
- W2061131567 hasConceptScore W2061131567C121332964 @default.
- W2061131567 hasConceptScore W2061131567C127162648 @default.
- W2061131567 hasConceptScore W2061131567C127413603 @default.
- W2061131567 hasConceptScore W2061131567C19118579 @default.
- W2061131567 hasConceptScore W2061131567C192562407 @default.
- W2061131567 hasConceptScore W2061131567C195251586 @default.
- W2061131567 hasConceptScore W2061131567C198394728 @default.
- W2061131567 hasConceptScore W2061131567C199360897 @default.
- W2061131567 hasConceptScore W2061131567C21200559 @default.
- W2061131567 hasConceptScore W2061131567C24326235 @default.
- W2061131567 hasConceptScore W2061131567C24890656 @default.
- W2061131567 hasConceptScore W2061131567C2779843651 @default.
- W2061131567 hasConceptScore W2061131567C31972630 @default.
- W2061131567 hasConceptScore W2061131567C37977207 @default.
- W2061131567 hasConceptScore W2061131567C41008148 @default.
- W2061131567 hasConceptScore W2061131567C46362747 @default.
- W2061131567 hasConceptScore W2061131567C49040817 @default.
- W2061131567 hasConceptScore W2061131567C55366258 @default.
- W2061131567 hasConceptScore W2061131567C65165936 @default.
- W2061131567 hasConceptScore W2061131567C74064498 @default.
- W2061131567 hasIssue "1" @default.
- W2061131567 hasLocation W20611315671 @default.
- W2061131567 hasOpenAccess W2061131567 @default.
- W2061131567 hasPrimaryLocation W20611315671 @default.
- W2061131567 hasRelatedWork W1971935277 @default.
- W2061131567 hasRelatedWork W199272321 @default.
- W2061131567 hasRelatedWork W2017735754 @default.
- W2061131567 hasRelatedWork W207143136 @default.
- W2061131567 hasRelatedWork W2120846645 @default.
- W2061131567 hasRelatedWork W2141713322 @default.
- W2061131567 hasRelatedWork W2364871466 @default.
- W2061131567 hasRelatedWork W2369323316 @default.
- W2061131567 hasRelatedWork W3013004152 @default.
- W2061131567 hasRelatedWork W3212210120 @default.
- W2061131567 hasVolume "156" @default.
- W2061131567 isParatext "false" @default.
- W2061131567 isRetracted "false" @default.
- W2061131567 magId "2061131567" @default.
- W2061131567 workType "article" @default.