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- W2061191344 abstract "As+-ion-induced silicide formation in nickel thin films on silicon was investigated by Rutherford backscattering spectrometry and transmission electron microscopy. The emphasis was on the study of ion-beam-induced microstructural changes. For 160 keV As+ implantation, amorphization of the interface occurred at a dose of 5 × 1014 cm−2. Ni2Si was found together with an amorphous layer after a 1 × 1015 cm−2 bombardment. For Ni/Si(100) the surface layer became completely amorphous after implantation to 5 × 1015 cm−2. Silicides were found after a 1 × 1016 cm−2 irradiation. The amorphous layer was not stable enough to withstand the enormous chemical driving force causing the formation of crystalline silicides as the composition ratio NSi/NNi reached a critical value. A similar trend for ion-beam-induced reactions was found for 190 keV As+ implantation on Ni/Si(111) as for 160 keV implantation. The results of post-implantation annealing showed major differences from those obtained for directly annealed samples." @default.
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- W2061191344 date "1983-06-01" @default.
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- W2061191344 title "Ion-beam-induced silicide formation in nickel thin films on silicon" @default.
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- W2061191344 doi "https://doi.org/10.1016/0040-6090(83)90558-8" @default.
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