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- W2061209509 abstract "The real-time detection of plasma fluorescence spectrum in reaction chamber is significant for optimizing running parameters of the plasma syntonization enhanced system and finding sample reaction state. This paper present the new type detection system of fluorescence spectrum. This system applies a principle of control light beam transmitting by entrance pupil and viewing field, and rotated method of optical tube. It can monitor fluorescence spectrum of pointed position in reaction chamber. Some designed essentials about plan of detection range, position optical path and optical path of detecting plasma fluorescence spectrum in the system are introduced in detail. The system features are that it can aim at pointed positions of big luminophor and measure spectrum. It especially suit to real-time detect for plasma states in range nearly substrate holder. This system can applied in PECVD and some research as Chemiluminescence reaction chamber." @default.
- W2061209509 created "2016-06-24" @default.
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- W2061209509 date "2005-02-10" @default.
- W2061209509 modified "2023-09-23" @default.
- W2061209509 title "The system on positioning detecting plasma fluorescence spectrum in reaction chamber" @default.
- W2061209509 doi "https://doi.org/10.1117/12.575749" @default.
- W2061209509 hasPublicationYear "2005" @default.
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