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- W2061240143 abstract "The Ga-induced reaction of photo-oxidized GaAs, which is used as a mask material for the in situ selective-area growth of GaAs, has been studied by mass spectrometry. An anomalous behavior of photo-oxidized GaAs was observed by measuring the temperature-programmed desorption after Ga predeposition and the desorption response to pulsed Ga injection onto it. Deposited Ga, less than 3 monolayers, did not directly deoxidize the photo-oxidized GaAs into a volatile product, but, on the contrary, stabilized it. This anomalous behavior was not observed for dark-oxidized GaAs. It is considered that Ga-induced stabilization of the oxide makes the photo-oxidized GaAs more effective as a mask for selective-area growth." @default.
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- W2061240143 date "1994-04-15" @default.
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- W2061240143 title "Mass spectrometric study of the reaction of photo‐oxidized GaAs with Ga" @default.
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- W2061240143 doi "https://doi.org/10.1063/1.356008" @default.
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