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- W2061328058 abstract "Confocal sensors are well established in optical surface metrology. Especially when measuring rough surfaces, their robustness is widely appreciated. However, it was shown lately that certain object features can produce severe artifacts in confocal measurements that are hard to identify as false measurements. Experimental evidence of these artifacts is given with a measurement of a suitable surface conducted with a chromatic confocal point sensor. Furthermore various simulations are presented that identify a self-imaging property of the surface features as the root of the artifacts. These simulations also pave the way to a more precise yet still intuitive signal model for confocal measurements." @default.
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- W2061328058 date "2012-10-11" @default.
- W2061328058 modified "2023-10-16" @default.
- W2061328058 title "Object-depending artifacts in confocal measurements" @default.
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- W2061328058 doi "https://doi.org/10.1117/12.929214" @default.
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