FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2061375278> ?p ?o ?g. }

• W2061375278 endingPage "343" @default.
• W2061375278 startingPage "341" @default.
• W2061375278 abstract "8 GHz range solidly mounted resonator (SMR) based on high quality direct current pulsed sputtered aluminum nitride (AlN) thin films have been fabricated on 100 mm diameter silicon wafer. Dispersion in AlN film thickness has been measured and on-wafer distribution of operating frequency, mechanical coupling and quality factor of the SMR has been investigated. Data is presented showing efficient coupling of a shear mode resonating in the 4 GHz range. This coupling was found to increase with wafer radius and related to the increasing tilt of crystalline c-planes of AlN thin film." @default.
• W2061375278 created "2016-06-24" @default.
• W2061375278 creator A5053190215 @default.
• W2061375278 creator A5078940840 @default.
• W2061375278 creator A5081770541 @default.
• W2061375278 creator A5082934428 @default.
• W2061375278 creator A5086229650 @default.
• W2061375278 date "2006-08-01" @default.
• W2061375278 modified "2023-10-02" @default.
• W2061375278 title "Shear mode coupling and properties dispersion in 8GHz range AlN thin film bulk acoustic wave (BAW) resonator" @default.
• W2061375278 cites W1971534932 @default.
• W2061375278 cites W1997184994 @default.
• W2061375278 cites W2033562417 @default.
• W2061375278 cites W2041690766 @default.
• W2061375278 cites W2074888718 @default.
• W2061375278 cites W2112349959 @default.
• W2061375278 cites W2142023360 @default.
• W2061375278 cites W2155492185 @default.
• W2061375278 doi "https://doi.org/10.1016/j.tsf.2006.03.005" @default.
• W2061375278 hasPublicationYear "2006" @default.
• W2061375278 type Work @default.
• W2061375278 sameAs 2061375278 @default.
• W2061375278 citedByCount "31" @default.
• W2061375278 countsByYear W20613752782012 @default.
• W2061375278 countsByYear W20613752782013 @default.
• W2061375278 countsByYear W20613752782017 @default.
• W2061375278 countsByYear W20613752782018 @default.
• W2061375278 countsByYear W20613752782020 @default.
• W2061375278 countsByYear W20613752782021 @default.
• W2061375278 countsByYear W20613752782022 @default.
• W2061375278 crossrefType "journal-article" @default.
• W2061375278 hasAuthorship W2061375278A5053190215 @default.
• W2061375278 hasAuthorship W2061375278A5078940840 @default.
• W2061375278 hasAuthorship W2061375278A5081770541 @default.
• W2061375278 hasAuthorship W2061375278A5082934428 @default.
• W2061375278 hasAuthorship W2061375278A5086229650 @default.
• W2061375278 hasConcept C120665830 @default.
• W2061375278 hasConcept C121332964 @default.
• W2061375278 hasConcept C127413603 @default.
• W2061375278 hasConcept C131584629 @default.
• W2061375278 hasConcept C159985019 @default.
• W2061375278 hasConcept C160671074 @default.
• W2061375278 hasConcept C171250308 @default.
• W2061375278 hasConcept C177562468 @default.
• W2061375278 hasConcept C178635117 @default.
• W2061375278 hasConcept C19067145 @default.
• W2061375278 hasConcept C192562407 @default.
• W2061375278 hasConcept C194760766 @default.
• W2061375278 hasConcept C2777431650 @default.
• W2061375278 hasConcept C2779227376 @default.
• W2061375278 hasConcept C2779844322 @default.
• W2061375278 hasConcept C38652104 @default.
• W2061375278 hasConcept C41008148 @default.
• W2061375278 hasConcept C49040817 @default.
• W2061375278 hasConcept C544956773 @default.
• W2061375278 hasConcept C78519656 @default.
• W2061375278 hasConcept C91397564 @default.
• W2061375278 hasConcept C97126364 @default.
• W2061375278 hasConceptScore W2061375278C120665830 @default.
• W2061375278 hasConceptScore W2061375278C121332964 @default.
• W2061375278 hasConceptScore W2061375278C127413603 @default.
• W2061375278 hasConceptScore W2061375278C131584629 @default.
• W2061375278 hasConceptScore W2061375278C159985019 @default.
• W2061375278 hasConceptScore W2061375278C160671074 @default.
• W2061375278 hasConceptScore W2061375278C171250308 @default.
• W2061375278 hasConceptScore W2061375278C177562468 @default.
• W2061375278 hasConceptScore W2061375278C178635117 @default.
• W2061375278 hasConceptScore W2061375278C19067145 @default.
• W2061375278 hasConceptScore W2061375278C192562407 @default.
• W2061375278 hasConceptScore W2061375278C194760766 @default.
• W2061375278 hasConceptScore W2061375278C2777431650 @default.
• W2061375278 hasConceptScore W2061375278C2779227376 @default.
• W2061375278 hasConceptScore W2061375278C2779844322 @default.
• W2061375278 hasConceptScore W2061375278C38652104 @default.
• W2061375278 hasConceptScore W2061375278C41008148 @default.
• W2061375278 hasConceptScore W2061375278C49040817 @default.
• W2061375278 hasConceptScore W2061375278C544956773 @default.
• W2061375278 hasConceptScore W2061375278C78519656 @default.
• W2061375278 hasConceptScore W2061375278C91397564 @default.
• W2061375278 hasConceptScore W2061375278C97126364 @default.
• W2061375278 hasIssue "1-2" @default.
• W2061375278 hasLocation W20613752781 @default.
• W2061375278 hasOpenAccess W2061375278 @default.
• W2061375278 hasPrimaryLocation W20613752781 @default.
• W2061375278 hasRelatedWork W1985334063 @default.
• W2061375278 hasRelatedWork W2000160237 @default.
• W2061375278 hasRelatedWork W2037075606 @default.
• W2061375278 hasRelatedWork W2056831688 @default.
• W2061375278 hasRelatedWork W2063695705 @default.
• W2061375278 hasRelatedWork W2092206813 @default.
• W2061375278 hasRelatedWork W2132991736 @default.
• W2061375278 hasRelatedWork W2315164216 @default.
• W2061375278 hasRelatedWork W4247374216 @default.
• W2061375278 hasRelatedWork W4250688100 @default.
• W2061375278 hasVolume "514" @default.
• W2061375278 isParatext "false" @default.
• W2061375278 isRetracted "false" @default.
• W2061375278 magId "2061375278" @default.

• next