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- W2061401199 abstract "When nanometer-scale holes (diameters of 50 to a few hundred nm) are imaged in a scanning electron microscope (SEM) at pressures in the 10−5 to 10−6 Torr range, hydrocarbon deposits build up and result in the closing of holes within minutes of imaging. Additionally, electron or ion beam assisted deposition of material from a gas source allows the closing of holes with films of platinum or tetraethylorthosilicate oxide. In an instrument equipped both with a focused ion beam, and a SEM, holes can be formed and then covered with a thin film to form nanopores with controlled openings, ranging down to only a few nanometers, well below resolution limits of primary beams." @default.
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- W2061401199 date "2003-11-01" @default.
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- W2061401199 title "Formation of a few nanometer wide holes in membranes with a dual beam focused ion beam system" @default.
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- W2061401199 doi "https://doi.org/10.1116/1.1622935" @default.
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