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- W2061459429 abstract "We optimized thin reoxidized nitrided (ROXNOX) films produced by RTP on the basis of a careful analysis of the requirements of EEPROMs. The influence of oxidation, nitridation, and reoxidation parameters on charge‐trapping and breakdown during a constant current stress was studied in detail. We show that a very light nitridation gives a maximum nitrogen concentration at the interface and the largest increase in the endurance of the films under a high‐field stress. The physical basis of these results is discussed. The improvement was confirmed on complete 1 kbit memory arrays produced with a 3 μm CMOS process with self‐aligned contacts. Their lifetime was increased by at least an order of magnitude, up to more than 106 cycles." @default.
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- W2061459429 date "1993-02-01" @default.
- W2061459429 modified "2023-10-09" @default.
- W2061459429 title "Optimization of Thin Si Oxynitride Films Produced by Rapid Thermal Processing for Applications in EEPROMs" @default.
- W2061459429 doi "https://doi.org/10.1149/1.2221086" @default.
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