Matches in SemOpenAlex for { <https://semopenalex.org/work/W2061489875> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W2061489875 endingPage "291" @default.
- W2061489875 startingPage "287" @default.
- W2061489875 abstract "Refractory metal alloy coatings, such as Mo–Ru and Ta–Ru coatings, have been developed to protect glass molding dies. Forming intermetallic compounds in the coatings inhibits grain growth in high temperature environments when mass producing optical components. After annealing in oxygen containing atmospheres, a surface roughening of the Mo–Ru coatings and a soft oxide layer on the Ta–Ru coatings have been observed in our previous works. Oxidation resistance becomes critical in high-temperature applications. In this study, Ta–Zr coatings were deposited with a Ti interlayer on silicon wafers using direct current magnetron sputtering at 400 °C. The as-deposited Ta–Zr coatings possessed nanocrystallite or amorphous states, depending on the chemical compositions. The annealing treatments were conducted at 600 °C under atmospheres of 50 ppm O2–N2 or 1% O2–Ar, respectively. After the annealing treatment, this study investigated variations in crystalline structure, hardness, surface roughness, and chemical composition profiles. Preferential oxidation of Zr in the Ta–Zr coatings was verified using X-ray photoelectron spectroscopy, and the microstructure was observed using transmission electron microscopy." @default.
- W2061489875 created "2016-06-24" @default.
- W2061489875 creator A5037334533 @default.
- W2061489875 creator A5054521341 @default.
- W2061489875 date "2013-02-01" @default.
- W2061489875 modified "2023-09-27" @default.
- W2061489875 title "Oxidation study of Ta–Zr coatings" @default.
- W2061489875 cites W1977759455 @default.
- W2061489875 cites W1981345815 @default.
- W2061489875 cites W1982737631 @default.
- W2061489875 cites W2018349922 @default.
- W2061489875 cites W2019291920 @default.
- W2061489875 cites W2022869572 @default.
- W2061489875 cites W2024017220 @default.
- W2061489875 cites W2046109669 @default.
- W2061489875 cites W2062283987 @default.
- W2061489875 cites W2066874036 @default.
- W2061489875 cites W2085101654 @default.
- W2061489875 cites W2086933933 @default.
- W2061489875 cites W2113439560 @default.
- W2061489875 cites W2145676497 @default.
- W2061489875 doi "https://doi.org/10.1016/j.tsf.2012.03.088" @default.
- W2061489875 hasPublicationYear "2013" @default.
- W2061489875 type Work @default.
- W2061489875 sameAs 2061489875 @default.
- W2061489875 citedByCount "4" @default.
- W2061489875 countsByYear W20614898752015 @default.
- W2061489875 countsByYear W20614898752016 @default.
- W2061489875 countsByYear W20614898752017 @default.
- W2061489875 countsByYear W20614898752019 @default.
- W2061489875 crossrefType "journal-article" @default.
- W2061489875 hasAuthorship W2061489875A5037334533 @default.
- W2061489875 hasAuthorship W2061489875A5054521341 @default.
- W2061489875 hasConcept C127413603 @default.
- W2061489875 hasConcept C159985019 @default.
- W2061489875 hasConcept C171250308 @default.
- W2061489875 hasConcept C175708663 @default.
- W2061489875 hasConcept C185592680 @default.
- W2061489875 hasConcept C19067145 @default.
- W2061489875 hasConcept C191897082 @default.
- W2061489875 hasConcept C192562407 @default.
- W2061489875 hasConcept C22423302 @default.
- W2061489875 hasConcept C27501479 @default.
- W2061489875 hasConcept C2777855556 @default.
- W2061489875 hasConcept C2779851234 @default.
- W2061489875 hasConcept C2780026712 @default.
- W2061489875 hasConcept C2781448156 @default.
- W2061489875 hasConcept C42360764 @default.
- W2061489875 hasConcept C56052488 @default.
- W2061489875 hasConcept C61427134 @default.
- W2061489875 hasConcept C8010536 @default.
- W2061489875 hasConcept C87976508 @default.
- W2061489875 hasConcept C95627916 @default.
- W2061489875 hasConceptScore W2061489875C127413603 @default.
- W2061489875 hasConceptScore W2061489875C159985019 @default.
- W2061489875 hasConceptScore W2061489875C171250308 @default.
- W2061489875 hasConceptScore W2061489875C175708663 @default.
- W2061489875 hasConceptScore W2061489875C185592680 @default.
- W2061489875 hasConceptScore W2061489875C19067145 @default.
- W2061489875 hasConceptScore W2061489875C191897082 @default.
- W2061489875 hasConceptScore W2061489875C192562407 @default.
- W2061489875 hasConceptScore W2061489875C22423302 @default.
- W2061489875 hasConceptScore W2061489875C27501479 @default.
- W2061489875 hasConceptScore W2061489875C2777855556 @default.
- W2061489875 hasConceptScore W2061489875C2779851234 @default.
- W2061489875 hasConceptScore W2061489875C2780026712 @default.
- W2061489875 hasConceptScore W2061489875C2781448156 @default.
- W2061489875 hasConceptScore W2061489875C42360764 @default.
- W2061489875 hasConceptScore W2061489875C56052488 @default.
- W2061489875 hasConceptScore W2061489875C61427134 @default.
- W2061489875 hasConceptScore W2061489875C8010536 @default.
- W2061489875 hasConceptScore W2061489875C87976508 @default.
- W2061489875 hasConceptScore W2061489875C95627916 @default.
- W2061489875 hasFunder F4320321040 @default.
- W2061489875 hasLocation W20614898751 @default.
- W2061489875 hasOpenAccess W2061489875 @default.
- W2061489875 hasPrimaryLocation W20614898751 @default.
- W2061489875 hasRelatedWork W1919346256 @default.
- W2061489875 hasRelatedWork W2089251307 @default.
- W2061489875 hasRelatedWork W2364133687 @default.
- W2061489875 hasRelatedWork W2366815809 @default.
- W2061489875 hasRelatedWork W2419295661 @default.
- W2061489875 hasRelatedWork W2528998499 @default.
- W2061489875 hasRelatedWork W3147764146 @default.
- W2061489875 hasRelatedWork W3200242440 @default.
- W2061489875 hasRelatedWork W40447320 @default.
- W2061489875 hasRelatedWork W4294704620 @default.
- W2061489875 hasVolume "529" @default.
- W2061489875 isParatext "false" @default.
- W2061489875 isRetracted "false" @default.
- W2061489875 magId "2061489875" @default.
- W2061489875 workType "article" @default.