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• W2061548660 abstract "ZrO2 thin films have been prepared by laser ablation of Zr or ZrO2 targets in oxygen reactive atmosphere. The influence of the deposition parameters as oxygen pressure and target composition on the structure and morphology of the deposited layers has been studied. Scanning electron microscopy, secondary ion mass spectroscopy and dielectric constant measurements have been performed to characterize the deposited layers. Dielectric constant values in the range 15–20 and low losses were evidenced for samples prepared in a narrow range of experimental conditions." @default.
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• W2061548660 date "2002-04-01" @default.
• W2061548660 modified "2023-10-18" @default.
• W2061548660 title "Properties of ZrO2 thin films prepared by laser ablation" @default.
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• W2061548660 doi "https://doi.org/10.1016/s1369-8001(02)00083-5" @default.
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