Matches in SemOpenAlex for { <https://semopenalex.org/work/W2061716897> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W2061716897 abstract "We studied the optical proximity effect, the depth of focus (DOF) and the mask-error-enhancement factor of ArF attenuated phase shift masks (att. PSMs) for application to 0.1-?m logic gate patterns. We made an ArF att. PSM with 6% transmittance and exposed it with an ArF scanner, NA = 0.60, using a 0.4- ?m-thick chemically amplified positive resist. We evaluated the performance under these conditions. We obtained the best result with annular illumination. The critical dimension variation range for the target was 23 nm from semi-dense to isolated line patterns. That was large but we could suppress it with bias optical proximity correction. The common DOF for both semi-dense and isolated line patterns was 0.4 pm, which is large enough to print 0.1-?m logic gate patterns. We confirmed good performance for fabricating 0.1-pm-logic gates with the ArF att. PSM and annular illumination." @default.
- W2061716897 created "2016-06-24" @default.
- W2061716897 creator A5082916420 @default.
- W2061716897 date "2001-01-22" @default.
- W2061716897 modified "2023-09-23" @default.
- W2061716897 title "Fabricating 0.10-μm line patterns using attenuated phase-shift masks" @default.
- W2061716897 doi "https://doi.org/10.1117/12.410710" @default.
- W2061716897 hasPublicationYear "2001" @default.
- W2061716897 type Work @default.
- W2061716897 sameAs 2061716897 @default.
- W2061716897 citedByCount "1" @default.
- W2061716897 crossrefType "proceedings-article" @default.
- W2061716897 hasAuthorship W2061716897A5082916420 @default.
- W2061716897 hasConcept C105487726 @default.
- W2061716897 hasConcept C119599485 @default.
- W2061716897 hasConcept C120665830 @default.
- W2061716897 hasConcept C121332964 @default.
- W2061716897 hasConcept C127413603 @default.
- W2061716897 hasConcept C131017901 @default.
- W2061716897 hasConcept C150493377 @default.
- W2061716897 hasConcept C171250308 @default.
- W2061716897 hasConcept C192562407 @default.
- W2061716897 hasConcept C198352243 @default.
- W2061716897 hasConcept C202444582 @default.
- W2061716897 hasConcept C207789793 @default.
- W2061716897 hasConcept C2524010 @default.
- W2061716897 hasConcept C2779227376 @default.
- W2061716897 hasConcept C2779751349 @default.
- W2061716897 hasConcept C33676613 @default.
- W2061716897 hasConcept C33923547 @default.
- W2061716897 hasConcept C44280652 @default.
- W2061716897 hasConcept C49040817 @default.
- W2061716897 hasConcept C53524968 @default.
- W2061716897 hasConcept C62520636 @default.
- W2061716897 hasConceptScore W2061716897C105487726 @default.
- W2061716897 hasConceptScore W2061716897C119599485 @default.
- W2061716897 hasConceptScore W2061716897C120665830 @default.
- W2061716897 hasConceptScore W2061716897C121332964 @default.
- W2061716897 hasConceptScore W2061716897C127413603 @default.
- W2061716897 hasConceptScore W2061716897C131017901 @default.
- W2061716897 hasConceptScore W2061716897C150493377 @default.
- W2061716897 hasConceptScore W2061716897C171250308 @default.
- W2061716897 hasConceptScore W2061716897C192562407 @default.
- W2061716897 hasConceptScore W2061716897C198352243 @default.
- W2061716897 hasConceptScore W2061716897C202444582 @default.
- W2061716897 hasConceptScore W2061716897C207789793 @default.
- W2061716897 hasConceptScore W2061716897C2524010 @default.
- W2061716897 hasConceptScore W2061716897C2779227376 @default.
- W2061716897 hasConceptScore W2061716897C2779751349 @default.
- W2061716897 hasConceptScore W2061716897C33676613 @default.
- W2061716897 hasConceptScore W2061716897C33923547 @default.
- W2061716897 hasConceptScore W2061716897C44280652 @default.
- W2061716897 hasConceptScore W2061716897C49040817 @default.
- W2061716897 hasConceptScore W2061716897C53524968 @default.
- W2061716897 hasConceptScore W2061716897C62520636 @default.
- W2061716897 hasLocation W20617168971 @default.
- W2061716897 hasOpenAccess W2061716897 @default.
- W2061716897 hasPrimaryLocation W20617168971 @default.
- W2061716897 hasRelatedWork W1974805049 @default.
- W2061716897 hasRelatedWork W1977654860 @default.
- W2061716897 hasRelatedWork W1986870662 @default.
- W2061716897 hasRelatedWork W1987202699 @default.
- W2061716897 hasRelatedWork W1987858373 @default.
- W2061716897 hasRelatedWork W1992022913 @default.
- W2061716897 hasRelatedWork W1995664668 @default.
- W2061716897 hasRelatedWork W1995738724 @default.
- W2061716897 hasRelatedWork W2021439200 @default.
- W2061716897 hasRelatedWork W2046461580 @default.
- W2061716897 hasRelatedWork W2051116534 @default.
- W2061716897 hasRelatedWork W2060476548 @default.
- W2061716897 hasRelatedWork W2069099957 @default.
- W2061716897 hasRelatedWork W2070362458 @default.
- W2061716897 hasRelatedWork W2072974827 @default.
- W2061716897 hasRelatedWork W2073914783 @default.
- W2061716897 hasRelatedWork W2082485407 @default.
- W2061716897 hasRelatedWork W2083219989 @default.
- W2061716897 hasRelatedWork W2094129987 @default.
- W2061716897 hasRelatedWork W2104507943 @default.
- W2061716897 isParatext "false" @default.
- W2061716897 isRetracted "false" @default.
- W2061716897 magId "2061716897" @default.
- W2061716897 workType "article" @default.