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• W2061730812 abstract "A model for chemical vapor deposition (CVD) at or near atmospheric pressure is presented. A linear stability analysis of planar growth is presented and a dispersion relation is derived that relates species transport, surface diffusion, surface tension and geometrical factors with the growth of perturbations. Severe fingering requires a description with arc-length as the independent variable. The finite element method is described to solve the evolution of the interface and of the gas-phase species concentration directly above the interface. Some examples are also given." @default.
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• W2061730812 date "2000-04-01" @default.
• W2061730812 modified "2023-10-17" @default.
• W2061730812 title "Chemical vapor deposition and morphology problems" @default.
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• W2061730812 doi "https://doi.org/10.1016/s0040-6090(99)01053-6" @default.
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