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- W2061751837 abstract "A micro test pattern prepared by focused ion beam milling was used to evaluate the three-dimensional resolution of a microtomograph at the BL20B2 beamline of SPring-8. The resolutions along the direction within the tomographic slice plane and perpendicular to it were determined from the modulation transfer functions. The through-plane resolution perpendicular to the tomographic slice was evaluated to be 8 µm, which corresponds to the spatial resolution of two-dimensional radiographs. In contrast, the in-plane resolution within the slice was evaluated to be 12 µm. Real-space interpolation was performed prior to the tomographic reconstruction, giving an improved in-plane resolution of 8.5 µm. However, the 8 µm pitch pattern was resolved in the interpolated slice image. To reflect this result, another resolution measure from the peak-to-valley difference plot was introduced. This resolution measure gave resolution limits of 7.4 µm for the in-plane direction and 6.1 µm for the through-plane direction. The three-dimensional test pattern along with the interpolated reconstruction enables the quantitative evaluation of the spatial resolution of microtomographs." @default.
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- W2061751837 date "2008-10-03" @default.
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- W2061751837 title "Evaluation of the improved three-dimensional resolution of a synchrotron radiation computed tomograph using a micro-fabricated test pattern" @default.
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- W2061751837 doi "https://doi.org/10.1107/s0909049508025685" @default.
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