Matches in SemOpenAlex for { <https://semopenalex.org/work/W2061796369> ?p ?o ?g. }
- W2061796369 endingPage "459" @default.
- W2061796369 startingPage "450" @default.
- W2061796369 abstract "Plasma damage of SiCOH low-k films in an oxygen plasma is studied using a transformer coupled plasma reactor. The concentration of oxygen atoms and O2+ ions is varied by using three different conditions: (1) bottom power only, (2) bottom and top power, and (3) top power only. After plasma exposure, the low-k samples are characterized by various experimental techniques. It is shown that the ion bombardment induced by the bottom power minimizes the plasma damage by increasing the recombination coefficient of oxygen radicals. Contrary to the expectations, the densification of the top surface by ion radiation was limited. The increase in the recombination coefficient is mainly provided by modification of the pore wall surface and creation of chemically active sites stimulating the recombination of oxygen atoms. The results show that a reduction in plasma damage can be achieved without sealing of low-k top surface." @default.
- W2061796369 created "2016-06-24" @default.
- W2061796369 creator A5014471747 @default.
- W2061796369 creator A5016385328 @default.
- W2061796369 creator A5016876955 @default.
- W2061796369 creator A5041707987 @default.
- W2061796369 creator A5044567603 @default.
- W2061796369 creator A5055367643 @default.
- W2061796369 creator A5059023805 @default.
- W2061796369 creator A5078141110 @default.
- W2061796369 date "2010-04-19" @default.
- W2061796369 modified "2023-09-30" @default.
- W2061796369 title "Effect of energetic ions on plasma damage of porous SiCOH low-k materials" @default.
- W2061796369 cites W1518884678 @default.
- W2061796369 cites W1968137519 @default.
- W2061796369 cites W1969756584 @default.
- W2061796369 cites W1969903651 @default.
- W2061796369 cites W1971368506 @default.
- W2061796369 cites W1975126890 @default.
- W2061796369 cites W1980085585 @default.
- W2061796369 cites W1988743985 @default.
- W2061796369 cites W1992743502 @default.
- W2061796369 cites W1999266130 @default.
- W2061796369 cites W2001990317 @default.
- W2061796369 cites W2003221923 @default.
- W2061796369 cites W2004234572 @default.
- W2061796369 cites W2007136993 @default.
- W2061796369 cites W2009221461 @default.
- W2061796369 cites W2011983179 @default.
- W2061796369 cites W2018081411 @default.
- W2061796369 cites W2018912339 @default.
- W2061796369 cites W2020926300 @default.
- W2061796369 cites W2022489895 @default.
- W2061796369 cites W2024036348 @default.
- W2061796369 cites W2025403088 @default.
- W2061796369 cites W2026219304 @default.
- W2061796369 cites W2031691531 @default.
- W2061796369 cites W2036081143 @default.
- W2061796369 cites W2040942802 @default.
- W2061796369 cites W2044769302 @default.
- W2061796369 cites W2051376844 @default.
- W2061796369 cites W2053206578 @default.
- W2061796369 cites W2055439999 @default.
- W2061796369 cites W2063081343 @default.
- W2061796369 cites W2063097249 @default.
- W2061796369 cites W2088147148 @default.
- W2061796369 cites W2100939322 @default.
- W2061796369 cites W2123384285 @default.
- W2061796369 cites W2134282642 @default.
- W2061796369 cites W2141026506 @default.
- W2061796369 cites W2143892809 @default.
- W2061796369 cites W2144531930 @default.
- W2061796369 doi "https://doi.org/10.1116/1.3372838" @default.
- W2061796369 hasPublicationYear "2010" @default.
- W2061796369 type Work @default.
- W2061796369 sameAs 2061796369 @default.
- W2061796369 citedByCount "32" @default.
- W2061796369 countsByYear W20617963692012 @default.
- W2061796369 countsByYear W20617963692013 @default.
- W2061796369 countsByYear W20617963692014 @default.
- W2061796369 countsByYear W20617963692015 @default.
- W2061796369 countsByYear W20617963692018 @default.
- W2061796369 countsByYear W20617963692019 @default.
- W2061796369 countsByYear W20617963692021 @default.
- W2061796369 countsByYear W20617963692022 @default.
- W2061796369 crossrefType "journal-article" @default.
- W2061796369 hasAuthorship W2061796369A5014471747 @default.
- W2061796369 hasAuthorship W2061796369A5016385328 @default.
- W2061796369 hasAuthorship W2061796369A5016876955 @default.
- W2061796369 hasAuthorship W2061796369A5041707987 @default.
- W2061796369 hasAuthorship W2061796369A5044567603 @default.
- W2061796369 hasAuthorship W2061796369A5055367643 @default.
- W2061796369 hasAuthorship W2061796369A5059023805 @default.
- W2061796369 hasAuthorship W2061796369A5078141110 @default.
- W2061796369 hasConcept C104317684 @default.
- W2061796369 hasConcept C107872376 @default.
- W2061796369 hasConcept C113196181 @default.
- W2061796369 hasConcept C121332964 @default.
- W2061796369 hasConcept C139066938 @default.
- W2061796369 hasConcept C145148216 @default.
- W2061796369 hasConcept C156695909 @default.
- W2061796369 hasConcept C159985019 @default.
- W2061796369 hasConcept C178790620 @default.
- W2061796369 hasConcept C185592680 @default.
- W2061796369 hasConcept C192562407 @default.
- W2061796369 hasConcept C540031477 @default.
- W2061796369 hasConcept C55493867 @default.
- W2061796369 hasConcept C62520636 @default.
- W2061796369 hasConcept C6648577 @default.
- W2061796369 hasConcept C82706917 @default.
- W2061796369 hasConceptScore W2061796369C104317684 @default.
- W2061796369 hasConceptScore W2061796369C107872376 @default.
- W2061796369 hasConceptScore W2061796369C113196181 @default.
- W2061796369 hasConceptScore W2061796369C121332964 @default.
- W2061796369 hasConceptScore W2061796369C139066938 @default.
- W2061796369 hasConceptScore W2061796369C145148216 @default.
- W2061796369 hasConceptScore W2061796369C156695909 @default.
- W2061796369 hasConceptScore W2061796369C159985019 @default.