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• W2062033584 abstract "The sensitivity of spectroscopic ellipsometry data to multilayer model parameters is shown to be a strong function of the angle of incidence. A quantitative study of sensitivity versus angle of incidence is performed for a GaAs-AlxGa1−xAs-GaAs substrate structure, showing that maximum sensitivity to layer thicknesses and AlGaAs composition occurs near the wavelength-dependent principal angle. These results are verified by experimental measurements on two molecular-beam epitaxy grown samples. New spectral features, not found in previous ellipsometry studies of similar structures, are also reported." @default.
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• W2062033584 date "1986-11-01" @default.
• W2062033584 modified "2023-10-13" @default.
• W2062033584 title "Variable angle of incidence spectroscopic ellipsometry: Application to GaAs-Al<i>x</i>Ga1−<i>x</i>As multiple heterostructures" @default.
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• W2062033584 doi "https://doi.org/10.1063/1.337695" @default.
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