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• W2062079341 endingPage "095607" @default.
• W2062079341 startingPage "095607" @default.
• W2062079341 abstract "In this paper we report the effect of Al interlayers on the growth characteristics of carbon nanotubes (CNTs) using as-deposited and plasma etched Fe-Si catalyst films as the catalysts. Al interlayers having various thicknesses ranging from 2 to 42 nm were deposited on Si substrates prior to the deposition of Fe-Si catalysts. It was found that the Al interlayer diffuses into the Fe-Si catalyst during the plasma etching prior to the CNT growth, leading to the swelling and amorphization of the catalyst. This allows enhanced carbon diffusion in the catalyst and therefore a faster growth rate of the resulting CNTs. It was also found that use of an Al interlayer having a thickness of ∼3 ± 1 nm is most effective. Due to the effectiveness of this, the normally required catalyst etching is no longer needed for the growth of CNTs." @default.
• W2062079341 created "2016-06-24" @default.
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• W2062079341 date "2008-02-12" @default.
• W2062079341 modified "2023-09-27" @default.
• W2062079341 title "Growth of CNTs on Fe–Si catalyst prepared on Si and Al coated Si substrates" @default.
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• W2062079341 doi "https://doi.org/10.1088/0957-4484/19/9/095607" @default.
• W2062079341 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/21817682" @default.
• W2062079341 hasPublicationYear "2008" @default.
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