FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2062105964> ?p ?o ?g. }

• W2062105964 endingPage "605" @default.
• W2062105964 startingPage "594" @default.
• W2062105964 abstract "Several Monte Carlo approaches for modeling electron–solid interaction have been investigated as to their impact on simulation accuracy and performance. An optimum set of models, including the Mott elastic scatter cross-section, the Moller inelastic scatter cross-section, and the continuous slow down approximation with the relativistic Bethe stopping power, have been identified as giving a good agreement with published experimental data while providing better simulation performance than more sophisticated approaches. It has been validated that the Mott cross-section should be used instead of Rutherford’s for correct prediction of both electron transmission and backscatter coefficients in the cases of thin films for incident beam energy in the range of 10–100 keV. The use of the Gryzinski cross-section for modeling inelastic scatter did not provide any accuracy improvement because the predicted beam widening in resist was of the same order as given by a more simplistic Moller model. It is also necessary to use the relativistic Bethe stopping power for incident beam energies >30 keV." @default.
• W2062105964 created "2016-06-24" @default.
• W2062105964 creator A5006399507 @default.
• W2062105964 creator A5031167376 @default.
• W2062105964 creator A5033648298 @default.
• W2062105964 creator A5043145637 @default.
• W2062105964 creator A5064441700 @default.
• W2062105964 creator A5075201573 @default.
• W2062105964 creator A5085398722 @default.
• W2062105964 date "2003-09-01" @default.
• W2062105964 modified "2023-10-14" @default.
• W2062105964 title "Modeling and simulation issues in Monte Carlo calculation of electron interaction with solid targets" @default.
• W2062105964 cites W1435890786 @default.
• W2062105964 cites W1596816465 @default.
• W2062105964 cites W1648507995 @default.
• W2062105964 cites W1702852046 @default.
• W2062105964 cites W1969005667 @default.
• W2062105964 cites W1971528712 @default.
• W2062105964 cites W1985969300 @default.
• W2062105964 cites W1996275661 @default.
• W2062105964 cites W1996353959 @default.
• W2062105964 cites W1996609563 @default.
• W2062105964 cites W20029647 @default.
• W2062105964 cites W2005554095 @default.
• W2062105964 cites W2021839274 @default.
• W2062105964 cites W2031514005 @default.
• W2062105964 cites W2039267189 @default.
• W2062105964 cites W2066685875 @default.
• W2062105964 cites W2075614019 @default.
• W2062105964 cites W2090258064 @default.
• W2062105964 cites W2165283579 @default.
• W2062105964 cites W1987664114 @default.
• W2062105964 doi "https://doi.org/10.1016/s0167-9317(03)00351-4" @default.
• W2062105964 hasPublicationYear "2003" @default.
• W2062105964 type Work @default.
• W2062105964 sameAs 2062105964 @default.
• W2062105964 citedByCount "15" @default.
• W2062105964 countsByYear W20621059642012 @default.
• W2062105964 countsByYear W20621059642013 @default.
• W2062105964 countsByYear W20621059642015 @default.
• W2062105964 countsByYear W20621059642019 @default.
• W2062105964 countsByYear W20621059642020 @default.
• W2062105964 crossrefType "journal-article" @default.
• W2062105964 hasAuthorship W2062105964A5006399507 @default.
• W2062105964 hasAuthorship W2062105964A5031167376 @default.
• W2062105964 hasAuthorship W2062105964A5033648298 @default.
• W2062105964 hasAuthorship W2062105964A5043145637 @default.
• W2062105964 hasAuthorship W2062105964A5064441700 @default.
• W2062105964 hasAuthorship W2062105964A5075201573 @default.
• W2062105964 hasAuthorship W2062105964A5085398722 @default.
• W2062105964 hasConcept C105795698 @default.
• W2062105964 hasConcept C120665830 @default.
• W2062105964 hasConcept C121332964 @default.
• W2062105964 hasConcept C121864883 @default.
• W2062105964 hasConcept C146904657 @default.
• W2062105964 hasConcept C147120987 @default.
• W2062105964 hasConcept C159985019 @default.
• W2062105964 hasConcept C168834538 @default.
• W2062105964 hasConcept C184779094 @default.
• W2062105964 hasConcept C185544564 @default.
• W2062105964 hasConcept C192562407 @default.
• W2062105964 hasConcept C19499675 @default.
• W2062105964 hasConcept C204323151 @default.
• W2062105964 hasConcept C30475298 @default.
• W2062105964 hasConcept C33923547 @default.
• W2062105964 hasConcept C52234038 @default.
• W2062105964 hasConcept C62520636 @default.
• W2062105964 hasConcept C94915269 @default.
• W2062105964 hasConcept C95312477 @default.
• W2062105964 hasConceptScore W2062105964C105795698 @default.
• W2062105964 hasConceptScore W2062105964C120665830 @default.
• W2062105964 hasConceptScore W2062105964C121332964 @default.
• W2062105964 hasConceptScore W2062105964C121864883 @default.
• W2062105964 hasConceptScore W2062105964C146904657 @default.
• W2062105964 hasConceptScore W2062105964C147120987 @default.
• W2062105964 hasConceptScore W2062105964C159985019 @default.
• W2062105964 hasConceptScore W2062105964C168834538 @default.
• W2062105964 hasConceptScore W2062105964C184779094 @default.
• W2062105964 hasConceptScore W2062105964C185544564 @default.
• W2062105964 hasConceptScore W2062105964C192562407 @default.
• W2062105964 hasConceptScore W2062105964C19499675 @default.
• W2062105964 hasConceptScore W2062105964C204323151 @default.
• W2062105964 hasConceptScore W2062105964C30475298 @default.
• W2062105964 hasConceptScore W2062105964C33923547 @default.
• W2062105964 hasConceptScore W2062105964C52234038 @default.
• W2062105964 hasConceptScore W2062105964C62520636 @default.
• W2062105964 hasConceptScore W2062105964C94915269 @default.
• W2062105964 hasConceptScore W2062105964C95312477 @default.
• W2062105964 hasIssue "2-4" @default.
• W2062105964 hasLocation W20621059641 @default.
• W2062105964 hasOpenAccess W2062105964 @default.
• W2062105964 hasPrimaryLocation W20621059641 @default.
• W2062105964 hasRelatedWork W1984278407 @default.
• W2062105964 hasRelatedWork W1996574332 @default.
• W2062105964 hasRelatedWork W2021467017 @default.
• W2062105964 hasRelatedWork W2038877356 @default.
• W2062105964 hasRelatedWork W2081106967 @default.
• W2062105964 hasRelatedWork W2083783691 @default.

• next