FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2062294800> ?p ?o ?g. }

• W2062294800 abstract "Abstract Damage characteristics of SiC surfaces etched by capacitively coupled radio frequency Ar plasmas at various gas pressures have been studied from the viewpoint of synergy effect of Ar plasma ion and plasma-induced ultraviolet (UV) light irradiations. In the absence of UV light emission at the low gas pressure of 10 mTorr, morphology of the etched SiC surface is similar to that of the as-grown surface regardless of an increase in etching time. In contrast, the experimental Si/C ratio at the surface decreases with an increase in etching time, which agrees with the simulation that Si atoms at the surface are preferentially removed by Ar + ions impinging on the surface. The agreement indicates that the physical etching effect, which originates from the Ar + impact, contributes to the decrease in the Si/C ratio. In the presence of the UV light emission, the surface morphology at the high gas pressure of 50–100 mTorr depends on the etching time. The surface morphology changes as the etching time increases to 200 min. The experimental etch depth at the etching time of 200 min does not agree with that of the simulation. The experimental etch depth is much higher than the simulated one. The difference connecting with the gas pressures can be related to the factor whether the UV light is emitted from the plasma: the result at the high gas pressure suggests the contribution of the synergy effect caused by the following possible phenomenon: Si–C bonding at the surface is weakened." @default.
• W2062294800 created "2016-06-24" @default.
• W2062294800 creator A5001854030 @default.
• W2062294800 creator A5006853414 @default.
• W2062294800 creator A5027025411 @default.
• W2062294800 creator A5038245335 @default.
• W2062294800 creator A5041458204 @default.
• W2062294800 creator A5052387109 @default.
• W2062294800 creator A5052552300 @default.
• W2062294800 creator A5067077344 @default.
• W2062294800 date "2013-11-01" @default.
• W2062294800 modified "2023-09-29" @default.
• W2062294800 title "Surface damage of 6H–SiC originating from argon plasma irradiation" @default.
• W2062294800 cites W1650498563 @default.
• W2062294800 cites W1964422724 @default.
• W2062294800 cites W1965247159 @default.
• W2062294800 cites W1970268204 @default.
• W2062294800 cites W1973169654 @default.
• W2062294800 cites W1976965670 @default.
• W2062294800 cites W1988708737 @default.
• W2062294800 cites W1995429416 @default.
• W2062294800 cites W1998819865 @default.
• W2062294800 cites W2005746991 @default.
• W2062294800 cites W2009559377 @default.
• W2062294800 cites W2017149299 @default.
• W2062294800 cites W2019886925 @default.
• W2062294800 cites W2022910738 @default.
• W2062294800 cites W2023280619 @default.
• W2062294800 cites W2025877899 @default.
• W2062294800 cites W2033014433 @default.
• W2062294800 cites W2036433132 @default.
• W2062294800 cites W2037257480 @default.
• W2062294800 cites W2043572334 @default.
• W2062294800 cites W2053667303 @default.
• W2062294800 cites W2060820234 @default.
• W2062294800 cites W2061139552 @default.
• W2062294800 cites W2068301610 @default.
• W2062294800 cites W2089001277 @default.
• W2062294800 cites W2092739219 @default.
• W2062294800 cites W2165215367 @default.
• W2062294800 doi "https://doi.org/10.1016/j.nimb.2013.05.084" @default.
• W2062294800 hasPublicationYear "2013" @default.
• W2062294800 type Work @default.
• W2062294800 sameAs 2062294800 @default.
• W2062294800 citedByCount "5" @default.
• W2062294800 countsByYear W20622948002014 @default.
• W2062294800 countsByYear W20622948002020 @default.
• W2062294800 crossrefType "journal-article" @default.
• W2062294800 hasAuthorship W2062294800A5001854030 @default.
• W2062294800 hasAuthorship W2062294800A5006853414 @default.
• W2062294800 hasAuthorship W2062294800A5027025411 @default.
• W2062294800 hasAuthorship W2062294800A5038245335 @default.
• W2062294800 hasAuthorship W2062294800A5041458204 @default.
• W2062294800 hasAuthorship W2062294800A5052387109 @default.
• W2062294800 hasAuthorship W2062294800A5052552300 @default.
• W2062294800 hasAuthorship W2062294800A5067077344 @default.
• W2062294800 hasConcept C100460472 @default.
• W2062294800 hasConcept C107187091 @default.
• W2062294800 hasConcept C111337013 @default.
• W2062294800 hasConcept C113196181 @default.
• W2062294800 hasConcept C121332964 @default.
• W2062294800 hasConcept C130472188 @default.
• W2062294800 hasConcept C145148216 @default.
• W2062294800 hasConcept C171250308 @default.
• W2062294800 hasConcept C178790620 @default.
• W2062294800 hasConcept C185544564 @default.
• W2062294800 hasConcept C185592680 @default.
• W2062294800 hasConcept C192562407 @default.
• W2062294800 hasConcept C2776798109 @default.
• W2062294800 hasConcept C2779227376 @default.
• W2062294800 hasConcept C30646810 @default.
• W2062294800 hasConcept C43617362 @default.
• W2062294800 hasConcept C49040817 @default.
• W2062294800 hasConcept C547737533 @default.
• W2062294800 hasConcept C62520636 @default.
• W2062294800 hasConcept C82706917 @default.
• W2062294800 hasConcept C85344455 @default.
• W2062294800 hasConcept C97355855 @default.
• W2062294800 hasConceptScore W2062294800C100460472 @default.
• W2062294800 hasConceptScore W2062294800C107187091 @default.
• W2062294800 hasConceptScore W2062294800C111337013 @default.
• W2062294800 hasConceptScore W2062294800C113196181 @default.
• W2062294800 hasConceptScore W2062294800C121332964 @default.
• W2062294800 hasConceptScore W2062294800C130472188 @default.
• W2062294800 hasConceptScore W2062294800C145148216 @default.
• W2062294800 hasConceptScore W2062294800C171250308 @default.
• W2062294800 hasConceptScore W2062294800C178790620 @default.
• W2062294800 hasConceptScore W2062294800C185544564 @default.
• W2062294800 hasConceptScore W2062294800C185592680 @default.
• W2062294800 hasConceptScore W2062294800C192562407 @default.
• W2062294800 hasConceptScore W2062294800C2776798109 @default.
• W2062294800 hasConceptScore W2062294800C2779227376 @default.
• W2062294800 hasConceptScore W2062294800C30646810 @default.
• W2062294800 hasConceptScore W2062294800C43617362 @default.
• W2062294800 hasConceptScore W2062294800C49040817 @default.
• W2062294800 hasConceptScore W2062294800C547737533 @default.
• W2062294800 hasConceptScore W2062294800C62520636 @default.
• W2062294800 hasConceptScore W2062294800C82706917 @default.
• W2062294800 hasConceptScore W2062294800C85344455 @default.
• W2062294800 hasConceptScore W2062294800C97355855 @default.

• next