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- W2062456486 abstract "This paper investigates the implementation of sub-resolution assist features (SRAFs) in high performance logic designs for the poly-gate conductor level. We will discuss the concepts used for SRAF rule generation, SRAF data preparation and what we term binary optical proximity correction (OPC) to prevent catastrophic line-width problems. Lithographic process window (PW) data obtained with SRAFs will be compared to PW data obtained without SRAF. SRAM cells are shown printed with annular illumination and SRAFs, for both the 130 nm and 100 nm logic nodes as defined by the International Technology Roadmap for Semiconductors (ITRS). This study includes a comparison of the experimental results of SRAMs printed from designs corrected with rule-based OPC to those printed from designs corrected with model-based OPC." @default.
- W2062456486 created "2016-06-24" @default.
- W2062456486 creator A5004664195 @default.
- W2062456486 creator A5014132438 @default.
- W2062456486 creator A5014857726 @default.
- W2062456486 creator A5022135357 @default.
- W2062456486 creator A5024720381 @default.
- W2062456486 creator A5031780110 @default.
- W2062456486 creator A5042932121 @default.
- W2062456486 creator A5044266820 @default.
- W2062456486 creator A5060325375 @default.
- W2062456486 creator A5061090987 @default.
- W2062456486 creator A5063751049 @default.
- W2062456486 creator A5065966165 @default.
- W2062456486 creator A5073775409 @default.
- W2062456486 creator A5077540087 @default.
- W2062456486 creator A5089346942 @default.
- W2062456486 date "2002-07-15" @default.
- W2062456486 modified "2023-09-24" @default.
- W2062456486 title "Subresolution assist feature implementation for high-performance logic gate-level lithography" @default.
- W2062456486 doi "https://doi.org/10.1117/12.474591" @default.
- W2062456486 hasPublicationYear "2002" @default.
- W2062456486 type Work @default.
- W2062456486 sameAs 2062456486 @default.
- W2062456486 citedByCount "9" @default.
- W2062456486 countsByYear W20624564862016 @default.
- W2062456486 countsByYear W20624564862020 @default.
- W2062456486 countsByYear W20624564862021 @default.
- W2062456486 crossrefType "proceedings-article" @default.
- W2062456486 hasAuthorship W2062456486A5004664195 @default.
- W2062456486 hasAuthorship W2062456486A5014132438 @default.
- W2062456486 hasAuthorship W2062456486A5014857726 @default.
- W2062456486 hasAuthorship W2062456486A5022135357 @default.
- W2062456486 hasAuthorship W2062456486A5024720381 @default.
- W2062456486 hasAuthorship W2062456486A5031780110 @default.
- W2062456486 hasAuthorship W2062456486A5042932121 @default.
- W2062456486 hasAuthorship W2062456486A5044266820 @default.
- W2062456486 hasAuthorship W2062456486A5060325375 @default.
- W2062456486 hasAuthorship W2062456486A5061090987 @default.
- W2062456486 hasAuthorship W2062456486A5063751049 @default.
- W2062456486 hasAuthorship W2062456486A5065966165 @default.
- W2062456486 hasAuthorship W2062456486A5073775409 @default.
- W2062456486 hasAuthorship W2062456486A5077540087 @default.
- W2062456486 hasAuthorship W2062456486A5089346942 @default.
- W2062456486 hasConcept C11413529 @default.
- W2062456486 hasConcept C118524514 @default.
- W2062456486 hasConcept C131017901 @default.
- W2062456486 hasConcept C138885662 @default.
- W2062456486 hasConcept C192562407 @default.
- W2062456486 hasConcept C204223013 @default.
- W2062456486 hasConcept C2776401178 @default.
- W2062456486 hasConcept C41008148 @default.
- W2062456486 hasConcept C41895202 @default.
- W2062456486 hasConcept C49040817 @default.
- W2062456486 hasConceptScore W2062456486C11413529 @default.
- W2062456486 hasConceptScore W2062456486C118524514 @default.
- W2062456486 hasConceptScore W2062456486C131017901 @default.
- W2062456486 hasConceptScore W2062456486C138885662 @default.
- W2062456486 hasConceptScore W2062456486C192562407 @default.
- W2062456486 hasConceptScore W2062456486C204223013 @default.
- W2062456486 hasConceptScore W2062456486C2776401178 @default.
- W2062456486 hasConceptScore W2062456486C41008148 @default.
- W2062456486 hasConceptScore W2062456486C41895202 @default.
- W2062456486 hasConceptScore W2062456486C49040817 @default.
- W2062456486 hasLocation W20624564861 @default.
- W2062456486 hasOpenAccess W2062456486 @default.
- W2062456486 hasPrimaryLocation W20624564861 @default.
- W2062456486 hasRelatedWork W1547612600 @default.
- W2062456486 hasRelatedWork W2045393060 @default.
- W2062456486 hasRelatedWork W2059612624 @default.
- W2062456486 hasRelatedWork W2104752822 @default.
- W2062456486 hasRelatedWork W2156334622 @default.
- W2062456486 hasRelatedWork W2163313452 @default.
- W2062456486 hasRelatedWork W2348531541 @default.
- W2062456486 hasRelatedWork W2349359195 @default.
- W2062456486 hasRelatedWork W2901485761 @default.
- W2062456486 hasRelatedWork W4248910437 @default.
- W2062456486 isParatext "false" @default.
- W2062456486 isRetracted "false" @default.
- W2062456486 magId "2062456486" @default.
- W2062456486 workType "article" @default.