Matches in SemOpenAlex for { <https://semopenalex.org/work/W2062592660> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W2062592660 endingPage "273" @default.
- W2062592660 startingPage "268" @default.
- W2062592660 abstract "Processing of dielectric layers using a plasma-based ion implantation (PBII) technique has general implications in terms of plasma specifications and pulse characteristics. In particular, the different aspects of the processing of dielectric layers are discussed as functions of plasma density, pulse duration, and layer characteristics (thickness and permittivity). Clearly, severe limitations (true implantation energy, arcing) may appear for high-density plasmas as well as for long pulse durations when processing dielectric layers with thicknesses in the millimeter range. Typical examples of ion implantation in dielectric materials are presented, e.g. oxygen ion implantation in polymer sheets (for hydrophilic or adhesion treatments) and nitrogen implantation of polysilicon films on glass. The experimental results demonstrate the feasibility of processing dielectric layers with the PBII technique, but with severe limitations resulting from the process itself." @default.
- W2062592660 created "2016-06-24" @default.
- W2062592660 creator A5012936428 @default.
- W2062592660 creator A5036060896 @default.
- W2062592660 creator A5050230991 @default.
- W2062592660 creator A5055201266 @default.
- W2062592660 creator A5058130161 @default.
- W2062592660 date "2001-01-01" @default.
- W2062592660 modified "2023-10-18" @default.
- W2062592660 title "PBII processing of dielectric layers: physical aspects limitations and experimental results" @default.
- W2062592660 cites W1976257191 @default.
- W2062592660 cites W1976787990 @default.
- W2062592660 cites W1981806246 @default.
- W2062592660 cites W1988339214 @default.
- W2062592660 cites W1991728117 @default.
- W2062592660 cites W2021128588 @default.
- W2062592660 cites W2026051933 @default.
- W2062592660 cites W2026453848 @default.
- W2062592660 cites W2042236725 @default.
- W2062592660 cites W2065038145 @default.
- W2062592660 cites W2096500520 @default.
- W2062592660 cites W2167868464 @default.
- W2062592660 doi "https://doi.org/10.1016/s0257-8972(00)00993-2" @default.
- W2062592660 hasPublicationYear "2001" @default.
- W2062592660 type Work @default.
- W2062592660 sameAs 2062592660 @default.
- W2062592660 citedByCount "31" @default.
- W2062592660 countsByYear W20625926602012 @default.
- W2062592660 countsByYear W20625926602013 @default.
- W2062592660 countsByYear W20625926602015 @default.
- W2062592660 countsByYear W20625926602022 @default.
- W2062592660 crossrefType "journal-article" @default.
- W2062592660 hasAuthorship W2062592660A5012936428 @default.
- W2062592660 hasAuthorship W2062592660A5036060896 @default.
- W2062592660 hasAuthorship W2062592660A5050230991 @default.
- W2062592660 hasAuthorship W2062592660A5055201266 @default.
- W2062592660 hasAuthorship W2062592660A5058130161 @default.
- W2062592660 hasConcept C119599485 @default.
- W2062592660 hasConcept C121332964 @default.
- W2062592660 hasConcept C127413603 @default.
- W2062592660 hasConcept C133386390 @default.
- W2062592660 hasConcept C145148216 @default.
- W2062592660 hasConcept C145738678 @default.
- W2062592660 hasConcept C165801399 @default.
- W2062592660 hasConcept C168651791 @default.
- W2062592660 hasConcept C192562407 @default.
- W2062592660 hasConcept C2780167933 @default.
- W2062592660 hasConcept C41823505 @default.
- W2062592660 hasConcept C49040817 @default.
- W2062592660 hasConcept C62520636 @default.
- W2062592660 hasConcept C82706917 @default.
- W2062592660 hasConceptScore W2062592660C119599485 @default.
- W2062592660 hasConceptScore W2062592660C121332964 @default.
- W2062592660 hasConceptScore W2062592660C127413603 @default.
- W2062592660 hasConceptScore W2062592660C133386390 @default.
- W2062592660 hasConceptScore W2062592660C145148216 @default.
- W2062592660 hasConceptScore W2062592660C145738678 @default.
- W2062592660 hasConceptScore W2062592660C165801399 @default.
- W2062592660 hasConceptScore W2062592660C168651791 @default.
- W2062592660 hasConceptScore W2062592660C192562407 @default.
- W2062592660 hasConceptScore W2062592660C2780167933 @default.
- W2062592660 hasConceptScore W2062592660C41823505 @default.
- W2062592660 hasConceptScore W2062592660C49040817 @default.
- W2062592660 hasConceptScore W2062592660C62520636 @default.
- W2062592660 hasConceptScore W2062592660C82706917 @default.
- W2062592660 hasIssue "2-3" @default.
- W2062592660 hasLocation W20625926601 @default.
- W2062592660 hasOpenAccess W2062592660 @default.
- W2062592660 hasPrimaryLocation W20625926601 @default.
- W2062592660 hasRelatedWork W1825698535 @default.
- W2062592660 hasRelatedWork W1997532743 @default.
- W2062592660 hasRelatedWork W2053668343 @default.
- W2062592660 hasRelatedWork W2068858291 @default.
- W2062592660 hasRelatedWork W2076353393 @default.
- W2062592660 hasRelatedWork W2077718091 @default.
- W2062592660 hasRelatedWork W2086745820 @default.
- W2062592660 hasRelatedWork W2087970663 @default.
- W2062592660 hasRelatedWork W2241394700 @default.
- W2062592660 hasRelatedWork W2362940819 @default.
- W2062592660 hasVolume "135" @default.
- W2062592660 isParatext "false" @default.
- W2062592660 isRetracted "false" @default.
- W2062592660 magId "2062592660" @default.
- W2062592660 workType "article" @default.