Matches in SemOpenAlex for { <https://semopenalex.org/work/W2062679368> ?p ?o ?g. }
Showing items 1 to 66 of
66
with 100 items per page.
- W2062679368 abstract "This paper attempts to investigate the possible degradation of the ester formed in PLASMASK 200G photoresist during extended silylation times with HMDS (hexamethyldisilazane). The breakdown of the ester results in the formation of a phenolic moiety and an amide. This may lead to silylation of this newly released phenolic OH-group in the unexposed regions, and hence a decrease in the contrast might occur. This would have a detrimental effect on critical dimension (CD) control. It was found that under higher ammonia concentrations, an ester degrades to release a phenolic group and also an amide. The silylation times involved are much greater than that used in the DESIRE process, and as such degradation of the ester in the DESIRE process is itself quite minimal. It is, however, suggested that a silylating agent that does not form a base on cleavage be used instead to reduce the degradation effect." @default.
- W2062679368 created "2016-06-24" @default.
- W2062679368 creator A5005389438 @default.
- W2062679368 creator A5015844372 @default.
- W2062679368 creator A5048833754 @default.
- W2062679368 date "1992-06-01" @default.
- W2062679368 modified "2023-09-26" @default.
- W2062679368 title "Ester degradation in the DESIRE process" @default.
- W2062679368 doi "https://doi.org/10.1117/12.59737" @default.
- W2062679368 hasPublicationYear "1992" @default.
- W2062679368 type Work @default.
- W2062679368 sameAs 2062679368 @default.
- W2062679368 citedByCount "0" @default.
- W2062679368 crossrefType "proceedings-article" @default.
- W2062679368 hasAuthorship W2062679368A5005389438 @default.
- W2062679368 hasAuthorship W2062679368A5015844372 @default.
- W2062679368 hasAuthorship W2062679368A5048833754 @default.
- W2062679368 hasConcept C134406635 @default.
- W2062679368 hasConcept C159985019 @default.
- W2062679368 hasConcept C161790260 @default.
- W2062679368 hasConcept C175156509 @default.
- W2062679368 hasConcept C178790620 @default.
- W2062679368 hasConcept C185592680 @default.
- W2062679368 hasConcept C188027245 @default.
- W2062679368 hasConcept C192562407 @default.
- W2062679368 hasConcept C2776568683 @default.
- W2062679368 hasConcept C2778439535 @default.
- W2062679368 hasConcept C2779227376 @default.
- W2062679368 hasConcept C2779679103 @default.
- W2062679368 hasConcept C41008148 @default.
- W2062679368 hasConcept C43369102 @default.
- W2062679368 hasConcept C5304478 @default.
- W2062679368 hasConcept C76155785 @default.
- W2062679368 hasConceptScore W2062679368C134406635 @default.
- W2062679368 hasConceptScore W2062679368C159985019 @default.
- W2062679368 hasConceptScore W2062679368C161790260 @default.
- W2062679368 hasConceptScore W2062679368C175156509 @default.
- W2062679368 hasConceptScore W2062679368C178790620 @default.
- W2062679368 hasConceptScore W2062679368C185592680 @default.
- W2062679368 hasConceptScore W2062679368C188027245 @default.
- W2062679368 hasConceptScore W2062679368C192562407 @default.
- W2062679368 hasConceptScore W2062679368C2776568683 @default.
- W2062679368 hasConceptScore W2062679368C2778439535 @default.
- W2062679368 hasConceptScore W2062679368C2779227376 @default.
- W2062679368 hasConceptScore W2062679368C2779679103 @default.
- W2062679368 hasConceptScore W2062679368C41008148 @default.
- W2062679368 hasConceptScore W2062679368C43369102 @default.
- W2062679368 hasConceptScore W2062679368C5304478 @default.
- W2062679368 hasConceptScore W2062679368C76155785 @default.
- W2062679368 hasLocation W20626793681 @default.
- W2062679368 hasOpenAccess W2062679368 @default.
- W2062679368 hasPrimaryLocation W20626793681 @default.
- W2062679368 hasRelatedWork W175137769 @default.
- W2062679368 hasRelatedWork W2001169673 @default.
- W2062679368 hasRelatedWork W2034130241 @default.
- W2062679368 hasRelatedWork W2062679368 @default.
- W2062679368 hasRelatedWork W2092204232 @default.
- W2062679368 hasRelatedWork W2179231773 @default.
- W2062679368 hasRelatedWork W2339554149 @default.
- W2062679368 hasRelatedWork W2476200319 @default.
- W2062679368 hasRelatedWork W2950122242 @default.
- W2062679368 hasRelatedWork W2951634820 @default.
- W2062679368 isParatext "false" @default.
- W2062679368 isRetracted "false" @default.
- W2062679368 magId "2062679368" @default.
- W2062679368 workType "article" @default.