FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2062682205> ?p ?o ?g. }

• W2062682205 endingPage "475" @default.
• W2062682205 startingPage "473" @default.
• W2062682205 abstract "We have studied the laterally seeded regrowth of polycrystalline Si film over SiO2 islands through the use of a very narrow strip electron beam of a high-energy density. A 0.5-μm polycrystalline Si film was deposited over the entire surface of wafers on which SiO2 islands, 30–100 μm wide and 2 cm long, had been formed. A stationary electron beam 60 μm×3 cm was focused on the wafer surface with an average energy density of 0.7 MW/cm2 at 10 kV. The wafers were irradiated for 0.1–2 ms while moving at a speed of up to 500 cm/s past the beam. A transmission electron microscopic analysis showed that the laterally seeded regrowth of Si films over SiO2 islands were realized successfully and that the regrowth film which covered the SiO2 islands resulted in a quasi-single-crystal film with small-angle boundaries. The average speed of the front of the lateral regrowth over the SiO2 was estimated to be about 200 cm/s." @default.
• W2062682205 created "2016-06-24" @default.
• W2062682205 creator A5029347100 @default.
• W2062682205 creator A5031986309 @default.
• W2062682205 creator A5038266141 @default.
• W2062682205 creator A5039742295 @default.
• W2062682205 creator A5055620335 @default.
• W2062682205 creator A5056344857 @default.
• W2062682205 creator A5065726369 @default.
• W2062682205 creator A5082338293 @default.
• W2062682205 date "1983-09-01" @default.
• W2062682205 modified "2023-09-27" @default.
• W2062682205 title "Laterally seeded regrowth of silicon over SiO2 through strip electron beam irradiation" @default.
• W2062682205 cites W1987866211 @default.
• W2062682205 cites W1988824084 @default.
• W2062682205 cites W1990843954 @default.
• W2062682205 cites W1998835380 @default.
• W2062682205 cites W2000061562 @default.
• W2062682205 cites W2027196793 @default.
• W2062682205 cites W2036548575 @default.
• W2062682205 cites W2044821352 @default.
• W2062682205 cites W2049254866 @default.
• W2062682205 cites W2050633422 @default.
• W2062682205 cites W2063838411 @default.
• W2062682205 cites W2067934601 @default.
• W2062682205 cites W2071124139 @default.
• W2062682205 cites W2071677478 @default.
• W2062682205 cites W2077505233 @default.
• W2062682205 cites W2080922202 @default.
• W2062682205 cites W2089073524 @default.
• W2062682205 cites W2097515465 @default.
• W2062682205 doi "https://doi.org/10.1063/1.94393" @default.
• W2062682205 hasPublicationYear "1983" @default.
• W2062682205 type Work @default.
• W2062682205 sameAs 2062682205 @default.
• W2062682205 citedByCount "33" @default.
• W2062682205 crossrefType "journal-article" @default.
• W2062682205 hasAuthorship W2062682205A5029347100 @default.
• W2062682205 hasAuthorship W2062682205A5031986309 @default.
• W2062682205 hasAuthorship W2062682205A5038266141 @default.
• W2062682205 hasAuthorship W2062682205A5039742295 @default.
• W2062682205 hasAuthorship W2062682205A5055620335 @default.
• W2062682205 hasAuthorship W2062682205A5056344857 @default.
• W2062682205 hasAuthorship W2062682205A5065726369 @default.
• W2062682205 hasAuthorship W2062682205A5082338293 @default.
• W2062682205 hasConcept C111337013 @default.
• W2062682205 hasConcept C120665830 @default.
• W2062682205 hasConcept C121332964 @default.
• W2062682205 hasConcept C137637335 @default.
• W2062682205 hasConcept C146088050 @default.
• W2062682205 hasConcept C147120987 @default.
• W2062682205 hasConcept C159985019 @default.
• W2062682205 hasConcept C160671074 @default.
• W2062682205 hasConcept C168834538 @default.
• W2062682205 hasConcept C171250308 @default.
• W2062682205 hasConcept C185544564 @default.
• W2062682205 hasConcept C191897082 @default.
• W2062682205 hasConcept C192562407 @default.
• W2062682205 hasConcept C2779227376 @default.
• W2062682205 hasConcept C2780565262 @default.
• W2062682205 hasConcept C49040817 @default.
• W2062682205 hasConcept C544956773 @default.
• W2062682205 hasConcept C62520636 @default.
• W2062682205 hasConcept C87359718 @default.
• W2062682205 hasConcept C95312477 @default.
• W2062682205 hasConceptScore W2062682205C111337013 @default.
• W2062682205 hasConceptScore W2062682205C120665830 @default.
• W2062682205 hasConceptScore W2062682205C121332964 @default.
• W2062682205 hasConceptScore W2062682205C137637335 @default.
• W2062682205 hasConceptScore W2062682205C146088050 @default.
• W2062682205 hasConceptScore W2062682205C147120987 @default.
• W2062682205 hasConceptScore W2062682205C159985019 @default.
• W2062682205 hasConceptScore W2062682205C160671074 @default.
• W2062682205 hasConceptScore W2062682205C168834538 @default.
• W2062682205 hasConceptScore W2062682205C171250308 @default.
• W2062682205 hasConceptScore W2062682205C185544564 @default.
• W2062682205 hasConceptScore W2062682205C191897082 @default.
• W2062682205 hasConceptScore W2062682205C192562407 @default.
• W2062682205 hasConceptScore W2062682205C2779227376 @default.
• W2062682205 hasConceptScore W2062682205C2780565262 @default.
• W2062682205 hasConceptScore W2062682205C49040817 @default.
• W2062682205 hasConceptScore W2062682205C544956773 @default.
• W2062682205 hasConceptScore W2062682205C62520636 @default.
• W2062682205 hasConceptScore W2062682205C87359718 @default.
• W2062682205 hasConceptScore W2062682205C95312477 @default.
• W2062682205 hasIssue "5" @default.
• W2062682205 hasLocation W20626822051 @default.
• W2062682205 hasOpenAccess W2062682205 @default.
• W2062682205 hasPrimaryLocation W20626822051 @default.
• W2062682205 hasRelatedWork W1580283484 @default.
• W2062682205 hasRelatedWork W1965709626 @default.
• W2062682205 hasRelatedWork W1973544168 @default.
• W2062682205 hasRelatedWork W2000645312 @default.
• W2062682205 hasRelatedWork W2014776566 @default.
• W2062682205 hasRelatedWork W2020126678 @default.
• W2062682205 hasRelatedWork W2027829809 @default.
• W2062682205 hasRelatedWork W2048400636 @default.
• W2062682205 hasRelatedWork W2334445966 @default.

• next