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- W2062707265 abstract "By using an atomic-force-microscope-based technique, we image the vibration of high-frequency, bulk-mode, thin-film resonators. Our experimental technique is capable of monitoring the vibration of these devices over a broad frequency range, from 1 MHz to beyond 10 GHz, allowing us to obtain quantitative measurements of the piezoelectric properties of thin-film materials in that frequency range. This technique allows us to map the complex vibration modes of a new generation of high-frequency bulk piezoelectric resonators, revealing the presence of vibration patterns of very different characteristic lengths." @default.
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- W2062707265 date "2000-07-03" @default.
- W2062707265 modified "2023-09-26" @default.
- W2062707265 title "Imaging of acoustic fields in bulk acoustic-wave thin-film resonators" @default.
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- W2062707265 doi "https://doi.org/10.1063/1.126901" @default.
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