Matches in SemOpenAlex for { <https://semopenalex.org/work/W2062787641> ?p ?o ?g. }
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- W2062787641 endingPage "192" @default.
- W2062787641 startingPage "187" @default.
- W2062787641 abstract "The characteristics of the spatial distribution of electron cyclotron resonance (ECR) plasma in an ECR-plasma enhanced metalorganic chemical vapour deposition system with a divergent magnetic field are investigated by a single Langmuir probe. The results show that the spatial distribution in the resonance room has a significant density gradient in both radial and axial directions. The ECR plasma density attains its highest value, about 3.0 × 1011 cm−3, at a position that moves away from the ECR point in the direction of the microwave window for about 2.5 cm. This peak is about ten times higher than the central plasma density in the downstream of the reactor chamber. Analysis of the spatial distribution in the reactor chamber shows that the ECR plasma in the upper region has poor radial and axial uniformity of plasma density and electron temperature under the influence of the magnetic field, whereas the plasma in the downstream region has fine radial uniformity. This excellent uniformity has extensive application in plasma processing. Furthermore, there is a maximum plasma density and a maximum electron temperature corresponding to a proper magnetic current. A change of magnetic current does not distort the characteristics of spatial distribution in the reactor chamber." @default.
- W2062787641 created "2016-06-24" @default.
- W2062787641 creator A5019581350 @default.
- W2062787641 creator A5039645274 @default.
- W2062787641 creator A5044790783 @default.
- W2062787641 creator A5053499133 @default.
- W2062787641 creator A5071807465 @default.
- W2062787641 creator A5083628822 @default.
- W2062787641 date "2006-02-22" @default.
- W2062787641 modified "2023-09-27" @default.
- W2062787641 title "Study on the characteristics of ECR plasma spatial distribution" @default.
- W2062787641 cites W1971066735 @default.
- W2062787641 cites W1986257826 @default.
- W2062787641 cites W2003471267 @default.
- W2062787641 cites W2008869771 @default.
- W2062787641 cites W2010349241 @default.
- W2062787641 cites W2011249014 @default.
- W2062787641 cites W2019687861 @default.
- W2062787641 cites W2033474949 @default.
- W2062787641 cites W2037616788 @default.
- W2062787641 cites W2048763851 @default.
- W2062787641 cites W2052184109 @default.
- W2062787641 cites W2054836596 @default.
- W2062787641 cites W2058233750 @default.
- W2062787641 cites W2072601086 @default.
- W2062787641 cites W2075494330 @default.
- W2062787641 cites W2077186034 @default.
- W2062787641 cites W2079511304 @default.
- W2062787641 cites W2095191029 @default.
- W2062787641 cites W2170709917 @default.
- W2062787641 cites W1967115534 @default.
- W2062787641 doi "https://doi.org/10.1088/0963-0252/15/2/003" @default.
- W2062787641 hasPublicationYear "2006" @default.
- W2062787641 type Work @default.
- W2062787641 sameAs 2062787641 @default.
- W2062787641 citedByCount "12" @default.
- W2062787641 countsByYear W20627876412012 @default.
- W2062787641 countsByYear W20627876412015 @default.
- W2062787641 countsByYear W20627876412017 @default.
- W2062787641 countsByYear W20627876412020 @default.
- W2062787641 countsByYear W20627876412022 @default.
- W2062787641 crossrefType "journal-article" @default.
- W2062787641 hasAuthorship W2062787641A5019581350 @default.
- W2062787641 hasAuthorship W2062787641A5039645274 @default.
- W2062787641 hasAuthorship W2062787641A5044790783 @default.
- W2062787641 hasAuthorship W2062787641A5053499133 @default.
- W2062787641 hasAuthorship W2062787641A5071807465 @default.
- W2062787641 hasAuthorship W2062787641A5083628822 @default.
- W2062787641 hasConcept C115260700 @default.
- W2062787641 hasConcept C121332964 @default.
- W2062787641 hasConcept C125485243 @default.
- W2062787641 hasConcept C147120987 @default.
- W2062787641 hasConcept C175361016 @default.
- W2062787641 hasConcept C176118016 @default.
- W2062787641 hasConcept C184779094 @default.
- W2062787641 hasConcept C185592680 @default.
- W2062787641 hasConcept C192039680 @default.
- W2062787641 hasConcept C22175881 @default.
- W2062787641 hasConcept C43503373 @default.
- W2062787641 hasConcept C44838205 @default.
- W2062787641 hasConcept C62520636 @default.
- W2062787641 hasConcept C82706917 @default.
- W2062787641 hasConcept C95974651 @default.
- W2062787641 hasConceptScore W2062787641C115260700 @default.
- W2062787641 hasConceptScore W2062787641C121332964 @default.
- W2062787641 hasConceptScore W2062787641C125485243 @default.
- W2062787641 hasConceptScore W2062787641C147120987 @default.
- W2062787641 hasConceptScore W2062787641C175361016 @default.
- W2062787641 hasConceptScore W2062787641C176118016 @default.
- W2062787641 hasConceptScore W2062787641C184779094 @default.
- W2062787641 hasConceptScore W2062787641C185592680 @default.
- W2062787641 hasConceptScore W2062787641C192039680 @default.
- W2062787641 hasConceptScore W2062787641C22175881 @default.
- W2062787641 hasConceptScore W2062787641C43503373 @default.
- W2062787641 hasConceptScore W2062787641C44838205 @default.
- W2062787641 hasConceptScore W2062787641C62520636 @default.
- W2062787641 hasConceptScore W2062787641C82706917 @default.
- W2062787641 hasConceptScore W2062787641C95974651 @default.
- W2062787641 hasIssue "2" @default.
- W2062787641 hasLocation W20627876411 @default.
- W2062787641 hasOpenAccess W2062787641 @default.
- W2062787641 hasPrimaryLocation W20627876411 @default.
- W2062787641 hasRelatedWork W1601588525 @default.
- W2062787641 hasRelatedWork W1619276345 @default.
- W2062787641 hasRelatedWork W2000932723 @default.
- W2062787641 hasRelatedWork W2069397480 @default.
- W2062787641 hasRelatedWork W2078148991 @default.
- W2062787641 hasRelatedWork W2088270456 @default.
- W2062787641 hasRelatedWork W3162271292 @default.
- W2062787641 hasRelatedWork W4367186977 @default.
- W2062787641 hasRelatedWork W93119083 @default.
- W2062787641 hasRelatedWork W2063985779 @default.
- W2062787641 hasVolume "15" @default.
- W2062787641 isParatext "false" @default.
- W2062787641 isRetracted "false" @default.
- W2062787641 magId "2062787641" @default.
- W2062787641 workType "article" @default.