Matches in SemOpenAlex for { <https://semopenalex.org/work/W2062804546> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W2062804546 endingPage "42" @default.
- W2062804546 startingPage "37" @default.
- W2062804546 abstract "In the last few years, considerable progress has been made in the understanding of a-Si-H growth processes. Deposition rate and surface temperature have been found to be the main factors governing film quality. Many models have been proposed to describe their influence on the growth and give guides for further improvement of a-Si:H quality. Owing to the complexity of the plasma, these models usually take into account only certain aspects of the deposition, thus restricting their applicability to a small parameter space. By taking into account all plasma processes, we come to the conclusion that overall, the main limiting factor for low defect density a-Si:H deposition at high rates is plasma polymerization, but not powder formation. Moreover, when this limitation is overcome, the deposition of a-Si:H by RF glow discharge can be considered as a process out of equilibrium in which a-Si:H films are obtained in a metastable state governed by the plasma conditions. From this point of view, light-induced degradation can be considered as a supply of energy which causes the sample to attain another metastable state." @default.
- W2062804546 created "2016-06-24" @default.
- W2062804546 creator A5066921816 @default.
- W2062804546 date "1993-12-01" @default.
- W2062804546 modified "2023-09-26" @default.
- W2062804546 title "Towards high deposition rates of a-Si:H: The limiting factors" @default.
- W2062804546 cites W1966985939 @default.
- W2062804546 cites W1970261206 @default.
- W2062804546 cites W1972656738 @default.
- W2062804546 cites W1977579733 @default.
- W2062804546 cites W1978220048 @default.
- W2062804546 cites W1990941456 @default.
- W2062804546 cites W1995011071 @default.
- W2062804546 cites W2003397929 @default.
- W2062804546 cites W2010718696 @default.
- W2062804546 cites W2012900242 @default.
- W2062804546 cites W2022661901 @default.
- W2062804546 cites W2026574504 @default.
- W2062804546 cites W2029156715 @default.
- W2062804546 cites W2032536692 @default.
- W2062804546 cites W2033458545 @default.
- W2062804546 cites W2041379058 @default.
- W2062804546 cites W2041477454 @default.
- W2062804546 cites W2043554779 @default.
- W2062804546 cites W2056495637 @default.
- W2062804546 cites W2070677399 @default.
- W2062804546 cites W2073731939 @default.
- W2062804546 cites W2074144928 @default.
- W2062804546 cites W2083431783 @default.
- W2062804546 cites W2086315369 @default.
- W2062804546 cites W2086916135 @default.
- W2062804546 cites W2088682389 @default.
- W2062804546 cites W2094264215 @default.
- W2062804546 cites W2099550902 @default.
- W2062804546 cites W2142290294 @default.
- W2062804546 cites W2331201361 @default.
- W2062804546 doi "https://doi.org/10.1016/0022-3093(93)90486-h" @default.
- W2062804546 hasPublicationYear "1993" @default.
- W2062804546 type Work @default.
- W2062804546 sameAs 2062804546 @default.
- W2062804546 citedByCount "32" @default.
- W2062804546 countsByYear W20628045462013 @default.
- W2062804546 countsByYear W20628045462015 @default.
- W2062804546 crossrefType "journal-article" @default.
- W2062804546 hasAuthorship W2062804546A5066921816 @default.
- W2062804546 hasConcept C121332964 @default.
- W2062804546 hasConcept C127413603 @default.
- W2062804546 hasConcept C151730666 @default.
- W2062804546 hasConcept C159467904 @default.
- W2062804546 hasConcept C178790620 @default.
- W2062804546 hasConcept C185544564 @default.
- W2062804546 hasConcept C185592680 @default.
- W2062804546 hasConcept C188198153 @default.
- W2062804546 hasConcept C192562407 @default.
- W2062804546 hasConcept C2816523 @default.
- W2062804546 hasConcept C61696701 @default.
- W2062804546 hasConcept C64297162 @default.
- W2062804546 hasConcept C78519656 @default.
- W2062804546 hasConcept C82706917 @default.
- W2062804546 hasConcept C86803240 @default.
- W2062804546 hasConcept C89464430 @default.
- W2062804546 hasConceptScore W2062804546C121332964 @default.
- W2062804546 hasConceptScore W2062804546C127413603 @default.
- W2062804546 hasConceptScore W2062804546C151730666 @default.
- W2062804546 hasConceptScore W2062804546C159467904 @default.
- W2062804546 hasConceptScore W2062804546C178790620 @default.
- W2062804546 hasConceptScore W2062804546C185544564 @default.
- W2062804546 hasConceptScore W2062804546C185592680 @default.
- W2062804546 hasConceptScore W2062804546C188198153 @default.
- W2062804546 hasConceptScore W2062804546C192562407 @default.
- W2062804546 hasConceptScore W2062804546C2816523 @default.
- W2062804546 hasConceptScore W2062804546C61696701 @default.
- W2062804546 hasConceptScore W2062804546C64297162 @default.
- W2062804546 hasConceptScore W2062804546C78519656 @default.
- W2062804546 hasConceptScore W2062804546C82706917 @default.
- W2062804546 hasConceptScore W2062804546C86803240 @default.
- W2062804546 hasConceptScore W2062804546C89464430 @default.
- W2062804546 hasLocation W20628045461 @default.
- W2062804546 hasOpenAccess W2062804546 @default.
- W2062804546 hasPrimaryLocation W20628045461 @default.
- W2062804546 hasRelatedWork W1979895412 @default.
- W2062804546 hasRelatedWork W1988752274 @default.
- W2062804546 hasRelatedWork W2011172510 @default.
- W2062804546 hasRelatedWork W2014539089 @default.
- W2062804546 hasRelatedWork W2029083822 @default.
- W2062804546 hasRelatedWork W2035547974 @default.
- W2062804546 hasRelatedWork W2046066408 @default.
- W2062804546 hasRelatedWork W2093710268 @default.
- W2062804546 hasRelatedWork W3032510072 @default.
- W2062804546 hasRelatedWork W1670618328 @default.
- W2062804546 hasVolume "164-166" @default.
- W2062804546 isParatext "false" @default.
- W2062804546 isRetracted "false" @default.
- W2062804546 magId "2062804546" @default.
- W2062804546 workType "article" @default.