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• W2062857913 abstract "The irradiation of SiO and SiO2 insulator layers with 0.5–3.2 MeV Cn+(n = 1…10) clusters leads to large erosion coefficients. The nuclear stopping component in these experiments is typically less than 5% of the total, and all observed effects are presumably due to the large electronic stopping energy density deposition upon cluster break-up. The sputtering yield can reach two hundred molecules per carbon cluster, i.e. two orders of magnitude higher than those obtained with single ion irradiations at the same energy per atom." @default.
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• W2062857913 date "1997-08-01" @default.
• W2062857913 modified "2023-09-30" @default.
• W2062857913 title "Giant sputtering rates from SiO (SiO2) irradiated by carbon clusters" @default.
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• W2062857913 doi "https://doi.org/10.1016/s0168-583x(97)00350-9" @default.
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