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- W2062883306 abstract "Theory of a dual rotating polarizer and analyzer ellipsometer is presented in this paper. This instrument with doubly modulated optical signal is designed to perform generalized ellipsometry optical characterization of anisotropic layered systems. In this study, i) configuration of the instrument, ii) calculation of optical signal, iii) processing of the signal to extract Fourier coefficients and then generalized angles, and iv) calibration procedures are presented in details." @default.
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- W2062883306 date "2013-07-01" @default.
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- W2062883306 title "Theory of dual-rotating polarizer and analyzer ellipsometer" @default.
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- W2062883306 doi "https://doi.org/10.1016/j.tsf.2013.05.105" @default.
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