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- W2062899874 abstract "The embedded regrowth of semiconductor device structures by CBE on InP substrates presents typical profile issues. To understand these growth patterns, we have developed a model, taking the beam geometrical aspect into consideration. The precursor flux modelling, including a rebound possibility of molecules from the substrate surface, leads to calculated profiles in agreement with experiments on several aspects: (i) growth rate uniformity on a 2 in substrate, (ii) beam shadow effect on a nonplanar substrate and (iii) lateral growth rate on groove sidewalls. Some guidelines can be deduced to obtain growth symmetry." @default.
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- W2062899874 date "1998-06-01" @default.
- W2062899874 modified "2023-09-25" @default.
- W2062899874 title "Beam geometrical modelling of CBE on nonplanar substrate" @default.
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- W2062899874 doi "https://doi.org/10.1016/s0022-0248(98)00093-1" @default.
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