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- W2062951750 abstract "This study concerns a common wafer manufacturing problem due to fracturing of anodized layer typically used to protect aluminum components from corrosive environment in plasma chamber. A computational approach is introduced for modeling of mechanical behavior of such structures. Predicted fracture morphology is consistent with the experimentally observed phenomena. Suggestions for mitigation of anodized aluminum fracturing related wafer failure are made." @default.
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- W2062951750 date "2014-05-01" @default.
- W2062951750 modified "2023-09-27" @default.
- W2062951750 title "Computational investigation of failure in anodized aluminum" @default.
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- W2062951750 doi "https://doi.org/10.1109/ectc.2014.6897582" @default.
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