FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2063005985> ?p ?o ?g. }

• W2063005985 endingPage "3852" @default.
• W2063005985 startingPage "3848" @default.
• W2063005985 abstract "A thermocouple-instrumented wafer was used to monitor the wafer temperature during chemical vapor deposition of a polycrystalline-silicon layer in a lamp-heated rapid thermal processor. The temperature of the oxidized silicon substrate varies by more than 100 °C as the polycrystalline-silicon layer is deposited because the reflectivity of the sample changes with increasing thickness of the deposited layer. Cross-section transmission electron microscopy shows that when the temperature decreases below the polycrystalline-to-amorphous transition temperature during deposition, a phase change occurs in the structure of the deposited film. The change in temperature qualitatively corresponds to the change in reflectivity as a function of silicon film thickness calculated from a simple model." @default.
• W2063005985 created "2016-06-24" @default.
• W2063005985 creator A5019224071 @default.
• W2063005985 creator A5045969649 @default.
• W2063005985 date "1990-04-15" @default.
• W2063005985 modified "2023-10-16" @default.
• W2063005985 title "Power absorption during deposition of polycrystalline-silicon in a lamp-heated chemical-vapor-deposition reactor" @default.
• W2063005985 cites W1977726569 @default.
• W2063005985 cites W1980524179 @default.
• W2063005985 cites W1993021236 @default.
• W2063005985 cites W2033201427 @default.
• W2063005985 cites W2042906403 @default.
• W2063005985 cites W2045679976 @default.
• W2063005985 cites W2118176794 @default.
• W2063005985 doi "https://doi.org/10.1063/1.345032" @default.
• W2063005985 hasPublicationYear "1990" @default.
• W2063005985 type Work @default.
• W2063005985 sameAs 2063005985 @default.
• W2063005985 citedByCount "7" @default.
• W2063005985 crossrefType "journal-article" @default.
• W2063005985 hasAuthorship W2063005985A5019224071 @default.
• W2063005985 hasAuthorship W2063005985A5045969649 @default.
• W2063005985 hasConcept C111368507 @default.
• W2063005985 hasConcept C113196181 @default.
• W2063005985 hasConcept C127313418 @default.
• W2063005985 hasConcept C137637335 @default.
• W2063005985 hasConcept C151730666 @default.
• W2063005985 hasConcept C159985019 @default.
• W2063005985 hasConcept C160671074 @default.
• W2063005985 hasConcept C168068576 @default.
• W2063005985 hasConcept C171250308 @default.
• W2063005985 hasConcept C183866003 @default.
• W2063005985 hasConcept C185592680 @default.
• W2063005985 hasConcept C19067145 @default.
• W2063005985 hasConcept C191897082 @default.
• W2063005985 hasConcept C192562407 @default.
• W2063005985 hasConcept C2776390347 @default.
• W2063005985 hasConcept C2777289219 @default.
• W2063005985 hasConcept C2779227376 @default.
• W2063005985 hasConcept C2779667780 @default.
• W2063005985 hasConcept C2780565262 @default.
• W2063005985 hasConcept C2816523 @default.
• W2063005985 hasConcept C43617362 @default.
• W2063005985 hasConcept C49040817 @default.
• W2063005985 hasConcept C544956773 @default.
• W2063005985 hasConcept C57410435 @default.
• W2063005985 hasConcept C64297162 @default.
• W2063005985 hasConcept C75937256 @default.
• W2063005985 hasConcept C80086925 @default.
• W2063005985 hasConcept C86803240 @default.
• W2063005985 hasConcept C87359718 @default.
• W2063005985 hasConceptScore W2063005985C111368507 @default.
• W2063005985 hasConceptScore W2063005985C113196181 @default.
• W2063005985 hasConceptScore W2063005985C127313418 @default.
• W2063005985 hasConceptScore W2063005985C137637335 @default.
• W2063005985 hasConceptScore W2063005985C151730666 @default.
• W2063005985 hasConceptScore W2063005985C159985019 @default.
• W2063005985 hasConceptScore W2063005985C160671074 @default.
• W2063005985 hasConceptScore W2063005985C168068576 @default.
• W2063005985 hasConceptScore W2063005985C171250308 @default.
• W2063005985 hasConceptScore W2063005985C183866003 @default.
• W2063005985 hasConceptScore W2063005985C185592680 @default.
• W2063005985 hasConceptScore W2063005985C19067145 @default.
• W2063005985 hasConceptScore W2063005985C191897082 @default.
• W2063005985 hasConceptScore W2063005985C192562407 @default.
• W2063005985 hasConceptScore W2063005985C2776390347 @default.
• W2063005985 hasConceptScore W2063005985C2777289219 @default.
• W2063005985 hasConceptScore W2063005985C2779227376 @default.
• W2063005985 hasConceptScore W2063005985C2779667780 @default.
• W2063005985 hasConceptScore W2063005985C2780565262 @default.
• W2063005985 hasConceptScore W2063005985C2816523 @default.
• W2063005985 hasConceptScore W2063005985C43617362 @default.
• W2063005985 hasConceptScore W2063005985C49040817 @default.
• W2063005985 hasConceptScore W2063005985C544956773 @default.
• W2063005985 hasConceptScore W2063005985C57410435 @default.
• W2063005985 hasConceptScore W2063005985C64297162 @default.
• W2063005985 hasConceptScore W2063005985C75937256 @default.
• W2063005985 hasConceptScore W2063005985C80086925 @default.
• W2063005985 hasConceptScore W2063005985C86803240 @default.
• W2063005985 hasConceptScore W2063005985C87359718 @default.
• W2063005985 hasIssue "8" @default.
• W2063005985 hasLocation W20630059851 @default.
• W2063005985 hasOpenAccess W2063005985 @default.
• W2063005985 hasPrimaryLocation W20630059851 @default.
• W2063005985 hasRelatedWork W2000645312 @default.
• W2063005985 hasRelatedWork W2000726913 @default.
• W2063005985 hasRelatedWork W2006219958 @default.
• W2063005985 hasRelatedWork W2030656308 @default.
• W2063005985 hasRelatedWork W2098138283 @default.
• W2063005985 hasRelatedWork W2356201124 @default.
• W2063005985 hasRelatedWork W2365002516 @default.
• W2063005985 hasRelatedWork W2620029653 @default.
• W2063005985 hasRelatedWork W2902087874 @default.
• W2063005985 hasRelatedWork W823364632 @default.
• W2063005985 hasVolume "67" @default.
• W2063005985 isParatext "false" @default.
• W2063005985 isRetracted "false" @default.
• W2063005985 magId "2063005985" @default.

• next