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- W2063017827 abstract "Cobalt sputtering has a disadvantage in the lost operation time resulting from unstable discharge when cobalt is deposited on the shield. We successfully achieved stable discharge by utilizing an ion gauge instead of an igniter, even during sputtering, to supply thermal electrons to the discharge space. This technique doubles productivity." @default.
- W2063017827 created "2016-06-24" @default.
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- W2063017827 date "2006-09-01" @default.
- W2063017827 modified "2023-09-25" @default.
- W2063017827 title "A Technique for Co Target Discharge Stabilization Using an Ion Gauge in the Sputtering System" @default.
- W2063017827 doi "https://doi.org/10.1109/issm.2006.4493114" @default.
- W2063017827 hasPublicationYear "2006" @default.
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