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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2063026634> ?p ?o ?g. }

• W2063026634 endingPage "306" @default.
• W2063026634 startingPage "304" @default.
• W2063026634 abstract "Elementary reactions in atomic layer deposition of zirconia using zirconium tetrachloride and water are investigated using the density functional theory. The atomistic mechanisms of the two deposition half cycles on the Zr–OH and Zr–Cl surface sites are investigated. Both half reactions proceed through the formation of stable intermediates, resulting in high barriers for HCl formation. We find that the intermediate stability is lowered as the surface temperature is raised. However, increasing temperature also increases the dissociation free-energy barrier, which in turn results in increased desorption of adsorbed precursors." @default.
• W2063026634 created "2016-06-24" @default.
• W2063026634 creator A5013873652 @default.
• W2063026634 creator A5030433764 @default.
• W2063026634 date "2002-07-08" @default.
• W2063026634 modified "2023-10-18" @default.
• W2063026634 title "Quantum chemical study of the elementary reactions in zirconium oxide atomic layer deposition" @default.
• W2063026634 cites W1966182479 @default.
• W2063026634 cites W1978321704 @default.
• W2063026634 cites W1982356449 @default.
• W2063026634 cites W1993243846 @default.
• W2063026634 cites W2016144889 @default.
• W2063026634 cites W2025135844 @default.
• W2063026634 cites W2026609365 @default.
• W2063026634 cites W2044490585 @default.
• W2063026634 cites W2068617439 @default.
• W2063026634 cites W2078852350 @default.
• W2063026634 cites W2166354192 @default.
• W2063026634 doi "https://doi.org/10.1063/1.1490415" @default.
• W2063026634 hasPublicationYear "2002" @default.
• W2063026634 type Work @default.
• W2063026634 sameAs 2063026634 @default.
• W2063026634 citedByCount "52" @default.
• W2063026634 countsByYear W20630266342012 @default.
• W2063026634 countsByYear W20630266342013 @default.
• W2063026634 countsByYear W20630266342014 @default.
• W2063026634 countsByYear W20630266342015 @default.
• W2063026634 countsByYear W20630266342016 @default.
• W2063026634 countsByYear W20630266342019 @default.
• W2063026634 countsByYear W20630266342021 @default.
• W2063026634 countsByYear W20630266342022 @default.
• W2063026634 crossrefType "journal-article" @default.
• W2063026634 hasAuthorship W2063026634A5013873652 @default.
• W2063026634 hasAuthorship W2063026634A5030433764 @default.
• W2063026634 hasConcept C102931765 @default.
• W2063026634 hasConcept C123609680 @default.
• W2063026634 hasConcept C134132462 @default.
• W2063026634 hasConcept C147597530 @default.
• W2063026634 hasConcept C147789679 @default.
• W2063026634 hasConcept C150394285 @default.
• W2063026634 hasConcept C151730666 @default.
• W2063026634 hasConcept C152365726 @default.
• W2063026634 hasConcept C162711632 @default.
• W2063026634 hasConcept C177801218 @default.
• W2063026634 hasConcept C178790620 @default.
• W2063026634 hasConcept C179104552 @default.
• W2063026634 hasConcept C185592680 @default.
• W2063026634 hasConcept C192562407 @default.
• W2063026634 hasConcept C2778179251 @default.
• W2063026634 hasConcept C2779227376 @default.
• W2063026634 hasConcept C2779851234 @default.
• W2063026634 hasConcept C2816523 @default.
• W2063026634 hasConcept C525849907 @default.
• W2063026634 hasConcept C534791751 @default.
• W2063026634 hasConcept C64297162 @default.
• W2063026634 hasConcept C69544855 @default.
• W2063026634 hasConcept C86803240 @default.
• W2063026634 hasConceptScore W2063026634C102931765 @default.
• W2063026634 hasConceptScore W2063026634C123609680 @default.
• W2063026634 hasConceptScore W2063026634C134132462 @default.
• W2063026634 hasConceptScore W2063026634C147597530 @default.
• W2063026634 hasConceptScore W2063026634C147789679 @default.
• W2063026634 hasConceptScore W2063026634C150394285 @default.
• W2063026634 hasConceptScore W2063026634C151730666 @default.
• W2063026634 hasConceptScore W2063026634C152365726 @default.
• W2063026634 hasConceptScore W2063026634C162711632 @default.
• W2063026634 hasConceptScore W2063026634C177801218 @default.
• W2063026634 hasConceptScore W2063026634C178790620 @default.
• W2063026634 hasConceptScore W2063026634C179104552 @default.
• W2063026634 hasConceptScore W2063026634C185592680 @default.
• W2063026634 hasConceptScore W2063026634C192562407 @default.
• W2063026634 hasConceptScore W2063026634C2778179251 @default.
• W2063026634 hasConceptScore W2063026634C2779227376 @default.
• W2063026634 hasConceptScore W2063026634C2779851234 @default.
• W2063026634 hasConceptScore W2063026634C2816523 @default.
• W2063026634 hasConceptScore W2063026634C525849907 @default.
• W2063026634 hasConceptScore W2063026634C534791751 @default.
• W2063026634 hasConceptScore W2063026634C64297162 @default.
• W2063026634 hasConceptScore W2063026634C69544855 @default.
• W2063026634 hasConceptScore W2063026634C86803240 @default.
• W2063026634 hasIssue "2" @default.
• W2063026634 hasLocation W20630266341 @default.
• W2063026634 hasOpenAccess W2063026634 @default.
• W2063026634 hasPrimaryLocation W20630266341 @default.
• W2063026634 hasRelatedWork W1561916148 @default.
• W2063026634 hasRelatedWork W1972872147 @default.
• W2063026634 hasRelatedWork W2012113691 @default.
• W2063026634 hasRelatedWork W2063026634 @default.
• W2063026634 hasRelatedWork W2153336689 @default.
• W2063026634 hasRelatedWork W2157741013 @default.
• W2063026634 hasRelatedWork W2378250891 @default.
• W2063026634 hasRelatedWork W2524254667 @default.
• W2063026634 hasRelatedWork W2529082 @default.
• W2063026634 hasRelatedWork W3094021758 @default.
• W2063026634 hasVolume "81" @default.
• W2063026634 isParatext "false" @default.
• W2063026634 isRetracted "false" @default.
• W2063026634 magId "2063026634" @default.

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