Matches in SemOpenAlex for { <https://semopenalex.org/work/W2063067742> ?p ?o ?g. }
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- W2063067742 endingPage "444" @default.
- W2063067742 startingPage "441" @default.
- W2063067742 abstract "As previously reported (1) our submicronic metrological applications were performed by SEM using the minimum current to minimize damage on the observed pattern and maximum accelerating voltage (4.9 KV) to increase the signal to noise ratio whatever the observed patterns. In order to obtain the maximum precision and even the maximum accuracy with or without calibrations, we decided to examine the effect of accelerating voltage, the current and the measurement methods. Whatever the settings are, we observed very small differences in measurements. The settings must be checked carefully before this experiment to avoid biaised results." @default.
- W2063067742 created "2016-06-24" @default.
- W2063067742 creator A5023587539 @default.
- W2063067742 creator A5042376223 @default.
- W2063067742 creator A5075926023 @default.
- W2063067742 creator A5085608974 @default.
- W2063067742 date "1989-05-01" @default.
- W2063067742 modified "2023-09-26" @default.
- W2063067742 title "Optimization of the metrological S.E.M. settings" @default.
- W2063067742 cites W1964374851 @default.
- W2063067742 cites W2013959633 @default.
- W2063067742 cites W2015956673 @default.
- W2063067742 cites W2095533216 @default.
- W2063067742 doi "https://doi.org/10.1016/0167-9317(89)90096-8" @default.
- W2063067742 hasPublicationYear "1989" @default.
- W2063067742 type Work @default.
- W2063067742 sameAs 2063067742 @default.
- W2063067742 citedByCount "0" @default.
- W2063067742 crossrefType "journal-article" @default.
- W2063067742 hasAuthorship W2063067742A5023587539 @default.
- W2063067742 hasAuthorship W2063067742A5042376223 @default.
- W2063067742 hasAuthorship W2063067742A5075926023 @default.
- W2063067742 hasAuthorship W2063067742A5085608974 @default.
- W2063067742 hasConcept C115961682 @default.
- W2063067742 hasConcept C119599485 @default.
- W2063067742 hasConcept C120665830 @default.
- W2063067742 hasConcept C121332964 @default.
- W2063067742 hasConcept C127413603 @default.
- W2063067742 hasConcept C13944312 @default.
- W2063067742 hasConcept C148043351 @default.
- W2063067742 hasConcept C154945302 @default.
- W2063067742 hasConcept C165801399 @default.
- W2063067742 hasConcept C171250308 @default.
- W2063067742 hasConcept C192562407 @default.
- W2063067742 hasConcept C195766429 @default.
- W2063067742 hasConcept C199360897 @default.
- W2063067742 hasConcept C2779843651 @default.
- W2063067742 hasConcept C41008148 @default.
- W2063067742 hasConcept C99498987 @default.
- W2063067742 hasConceptScore W2063067742C115961682 @default.
- W2063067742 hasConceptScore W2063067742C119599485 @default.
- W2063067742 hasConceptScore W2063067742C120665830 @default.
- W2063067742 hasConceptScore W2063067742C121332964 @default.
- W2063067742 hasConceptScore W2063067742C127413603 @default.
- W2063067742 hasConceptScore W2063067742C13944312 @default.
- W2063067742 hasConceptScore W2063067742C148043351 @default.
- W2063067742 hasConceptScore W2063067742C154945302 @default.
- W2063067742 hasConceptScore W2063067742C165801399 @default.
- W2063067742 hasConceptScore W2063067742C171250308 @default.
- W2063067742 hasConceptScore W2063067742C192562407 @default.
- W2063067742 hasConceptScore W2063067742C195766429 @default.
- W2063067742 hasConceptScore W2063067742C199360897 @default.
- W2063067742 hasConceptScore W2063067742C2779843651 @default.
- W2063067742 hasConceptScore W2063067742C41008148 @default.
- W2063067742 hasConceptScore W2063067742C99498987 @default.
- W2063067742 hasIssue "1-4" @default.
- W2063067742 hasLocation W20630677421 @default.
- W2063067742 hasOpenAccess W2063067742 @default.
- W2063067742 hasPrimaryLocation W20630677421 @default.
- W2063067742 hasRelatedWork W1550870027 @default.
- W2063067742 hasRelatedWork W1992829605 @default.
- W2063067742 hasRelatedWork W1999491918 @default.
- W2063067742 hasRelatedWork W2068835330 @default.
- W2063067742 hasRelatedWork W2085535279 @default.
- W2063067742 hasRelatedWork W2139326816 @default.
- W2063067742 hasRelatedWork W2157373963 @default.
- W2063067742 hasRelatedWork W2296377085 @default.
- W2063067742 hasRelatedWork W2750416835 @default.
- W2063067742 hasRelatedWork W2184652851 @default.
- W2063067742 hasVolume "9" @default.
- W2063067742 isParatext "false" @default.
- W2063067742 isRetracted "false" @default.
- W2063067742 magId "2063067742" @default.
- W2063067742 workType "article" @default.