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- W2063217943 abstract "The in-situ formation of antimony fluorides in a continuous flow reactor was investigated. Molecular fluorine was delivered from a VAC™ cylinder into heated reactor packed with antimony metal. The post-reactor pressure was monitored and effluent species were measured using IR and mass spectroscopic techniques. Complete fluorine utilization was achieved when operating at temperatures greater than 160°C. The data suggests that the antimony and fluorine reaction formed antimony (III) fluoride or Sb <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>x</sub> F <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>y</sub> clusters with boiling points greater 250°C. The report also includes recommendations for implementing this technology for ion implant applications." @default.
- W2063217943 created "2016-06-24" @default.
- W2063217943 creator A5005111799 @default.
- W2063217943 date "2002-01-01" @default.
- W2063217943 modified "2023-09-27" @default.
- W2063217943 title "Report on in-situ antimony fluoride generation for ion implant processes" @default.
- W2063217943 cites W2124101356 @default.
- W2063217943 doi "https://doi.org/10.1109/iit.2002.1258038" @default.
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