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- W2063268440 abstract "A rotating polarizer multichannel ellipsometer has been optimized for operation well into the ultraviolet (UV) spectral range. Key modifications to previous instrument designs include (i) a tandem in-line Xe/D2 source configuration for usable spectral output from 1.5 (827 nm) to 6.5 eV (191 nm), (ii) MgF2 Rochon polarizers for high transmission in the UV and (iii) a spectrograph with a grating blazed at 250 nm and two stages of internally-mounted order-sorting filters. The resulting multichannel ellipsometer provides 132 point spectra in the ellipsometric parameters (ψ, Δ) over the range from 1.5 to 6.5 eV with a minimum acquisition time of 24.5 ms. As an example of the application of this instrument, real-time spectroscopic ellipsometry (SE) is reported for the analysis of a hexagonal boron nitride thin film deposition by radio-frequency magnetron sputtering onto a silicon wafer substrate." @default.
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- W2063268440 date "2000-03-01" @default.
- W2063268440 modified "2023-10-17" @default.
- W2063268440 title "Real-time spectroscopic ellipsometry from 1.5 to 6.5 eV" @default.
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- W2063268440 doi "https://doi.org/10.1016/s0040-6090(99)00916-5" @default.
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