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• W2063270290 endingPage "3866" @default.
• W2063270290 startingPage "3863" @default.
• W2063270290 abstract "Fabrication of high aspect ratio patterns with an aspect ratio larger than 10 is attempted by nano imprint lithography. A fine mold using a chemical vapor deposition (CVD) diamond layer is newly developed by electron cyclotron resonance (ECR) using Cl2-O2 gas. Narrow grooves less than 100 nm in width and 1.0 µm in depth are successfully obtained. Using medium molecular weight PMMA (Mw=350 k) and with slow advance of the cooling sequence in the imprint process, the fatal error of the polymer fracture is eliminated at the mold release process. Based on the advanced process, we first demonstrate the fabrication of high aspect ratio patterns over 20 with 80 nm line width, however, the polymer might be stretched during the mold release process." @default.
• W2063270290 created "2016-06-24" @default.
• W2063270290 creator A5003110929 @default.
• W2063270290 creator A5020432791 @default.
• W2063270290 creator A5045820432 @default.
• W2063270290 creator A5048937697 @default.
• W2063270290 creator A5059434587 @default.
• W2063270290 creator A5061608187 @default.
• W2063270290 creator A5071127380 @default.
• W2063270290 date "2003-06-30" @default.
• W2063270290 modified "2023-10-18" @default.
• W2063270290 title "High Aspect Pattern Fabrication by Nano Imprint Lithography Using Fine Diamond Mold" @default.
• W2063270290 cites W2023507103 @default.
• W2063270290 cites W2062074587 @default.
• W2063270290 cites W2074248567 @default.
• W2063270290 cites W2082605358 @default.
• W2063270290 doi "https://doi.org/10.1143/jjap.42.3863" @default.
• W2063270290 hasPublicationYear "2003" @default.
• W2063270290 type Work @default.
• W2063270290 sameAs 2063270290 @default.
• W2063270290 citedByCount "76" @default.
• W2063270290 countsByYear W20632702902012 @default.
• W2063270290 countsByYear W20632702902013 @default.
• W2063270290 countsByYear W20632702902014 @default.
• W2063270290 countsByYear W20632702902015 @default.
• W2063270290 countsByYear W20632702902016 @default.
• W2063270290 countsByYear W20632702902017 @default.
• W2063270290 countsByYear W20632702902018 @default.
• W2063270290 countsByYear W20632702902019 @default.
• W2063270290 countsByYear W20632702902020 @default.
• W2063270290 countsByYear W20632702902021 @default.
• W2063270290 countsByYear W20632702902022 @default.
• W2063270290 countsByYear W20632702902023 @default.
• W2063270290 crossrefType "journal-article" @default.
• W2063270290 hasAuthorship W2063270290A5003110929 @default.
• W2063270290 hasAuthorship W2063270290A5020432791 @default.
• W2063270290 hasAuthorship W2063270290A5045820432 @default.
• W2063270290 hasAuthorship W2063270290A5048937697 @default.
• W2063270290 hasAuthorship W2063270290A5059434587 @default.
• W2063270290 hasAuthorship W2063270290A5061608187 @default.
• W2063270290 hasAuthorship W2063270290A5071127380 @default.
• W2063270290 hasConcept C121332964 @default.
• W2063270290 hasConcept C136525101 @default.
• W2063270290 hasConcept C142724271 @default.
• W2063270290 hasConcept C147120987 @default.
• W2063270290 hasConcept C151730666 @default.
• W2063270290 hasConcept C159985019 @default.
• W2063270290 hasConcept C162117346 @default.
• W2063270290 hasConcept C171250308 @default.
• W2063270290 hasConcept C175361016 @default.
• W2063270290 hasConcept C192562407 @default.
• W2063270290 hasConcept C200274948 @default.
• W2063270290 hasConcept C204223013 @default.
• W2063270290 hasConcept C204787440 @default.
• W2063270290 hasConcept C26771246 @default.
• W2063270290 hasConcept C2776921476 @default.
• W2063270290 hasConcept C2779227376 @default.
• W2063270290 hasConcept C2780566776 @default.
• W2063270290 hasConcept C2816523 @default.
• W2063270290 hasConcept C49040817 @default.
• W2063270290 hasConcept C521977710 @default.
• W2063270290 hasConcept C53524968 @default.
• W2063270290 hasConcept C57410435 @default.
• W2063270290 hasConcept C62520636 @default.
• W2063270290 hasConcept C64297162 @default.
• W2063270290 hasConcept C71924100 @default.
• W2063270290 hasConcept C82558694 @default.
• W2063270290 hasConcept C86803240 @default.
• W2063270290 hasConceptScore W2063270290C121332964 @default.
• W2063270290 hasConceptScore W2063270290C136525101 @default.
• W2063270290 hasConceptScore W2063270290C142724271 @default.
• W2063270290 hasConceptScore W2063270290C147120987 @default.
• W2063270290 hasConceptScore W2063270290C151730666 @default.
• W2063270290 hasConceptScore W2063270290C159985019 @default.
• W2063270290 hasConceptScore W2063270290C162117346 @default.
• W2063270290 hasConceptScore W2063270290C171250308 @default.
• W2063270290 hasConceptScore W2063270290C175361016 @default.
• W2063270290 hasConceptScore W2063270290C192562407 @default.
• W2063270290 hasConceptScore W2063270290C200274948 @default.
• W2063270290 hasConceptScore W2063270290C204223013 @default.
• W2063270290 hasConceptScore W2063270290C204787440 @default.
• W2063270290 hasConceptScore W2063270290C26771246 @default.
• W2063270290 hasConceptScore W2063270290C2776921476 @default.
• W2063270290 hasConceptScore W2063270290C2779227376 @default.
• W2063270290 hasConceptScore W2063270290C2780566776 @default.
• W2063270290 hasConceptScore W2063270290C2816523 @default.
• W2063270290 hasConceptScore W2063270290C49040817 @default.
• W2063270290 hasConceptScore W2063270290C521977710 @default.
• W2063270290 hasConceptScore W2063270290C53524968 @default.
• W2063270290 hasConceptScore W2063270290C57410435 @default.
• W2063270290 hasConceptScore W2063270290C62520636 @default.
• W2063270290 hasConceptScore W2063270290C64297162 @default.
• W2063270290 hasConceptScore W2063270290C71924100 @default.
• W2063270290 hasConceptScore W2063270290C82558694 @default.
• W2063270290 hasConceptScore W2063270290C86803240 @default.
• W2063270290 hasIssue "Part 1, No. 6B" @default.
• W2063270290 hasLocation W20632702901 @default.
• W2063270290 hasOpenAccess W2063270290 @default.

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