FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2063307704> ?p ?o ?g. }

• W2063307704 endingPage "155" @default.
• W2063307704 startingPage "149" @default.
• W2063307704 abstract "The growth and structural evolution of the carbon nitride (CN x ) film, deposited by rf magnetron sputtering in Ar/N 2 discharge, were studied. The CN x (0.23≤ x ≤0.71) films were deposited on Si(1 0 0) at rf power between 50 and 250 W. Simultaneously, Ar/N 2 gas ratio was varied from 0 to 18 with total pressure kept at 6.6×10 −1 Pa. The composition, structure, and chemical bonding configuration of the CN x films were found to be strongly dependent on deposition parameters (rf power and Ar/N 2 gas ratio). Based on these results, a relationship between deposition parameter and film properties ([N]/[C] ratio, surface roughness, and sp 3 /sp 2 bond ratio) was established." @default.
• W2063307704 created "2016-06-24" @default.
• W2063307704 creator A5015673562 @default.
• W2063307704 creator A5024662088 @default.
• W2063307704 date "2003-06-01" @default.
• W2063307704 modified "2023-09-23" @default.
• W2063307704 title "Correlation between deposition parameters and structural modification of amorphous carbon nitride (a-CNx) film in magnetron sputtering" @default.
• W2063307704 cites W1980997151 @default.
• W2063307704 cites W1994632941 @default.
• W2063307704 cites W2011828319 @default.
• W2063307704 cites W2017850410 @default.
• W2063307704 cites W2018915339 @default.
• W2063307704 cites W2038404392 @default.
• W2063307704 cites W2038979249 @default.
• W2063307704 cites W2041301890 @default.
• W2063307704 cites W2073861779 @default.
• W2063307704 cites W2079584869 @default.
• W2063307704 cites W2084788820 @default.
• W2063307704 cites W2092332261 @default.
• W2063307704 cites W2095183611 @default.
• W2063307704 cites W2314747532 @default.
• W2063307704 cites W2525061264 @default.
• W2063307704 cites W2061343834 @default.
• W2063307704 doi "https://doi.org/10.1016/s0169-4332(03)00507-5" @default.
• W2063307704 hasPublicationYear "2003" @default.
• W2063307704 type Work @default.
• W2063307704 sameAs 2063307704 @default.
• W2063307704 citedByCount "16" @default.
• W2063307704 countsByYear W20633077042012 @default.
• W2063307704 countsByYear W20633077042013 @default.
• W2063307704 countsByYear W20633077042017 @default.
• W2063307704 countsByYear W20633077042018 @default.
• W2063307704 crossrefType "journal-article" @default.
• W2063307704 hasAuthorship W2063307704A5015673562 @default.
• W2063307704 hasAuthorship W2063307704A5024662088 @default.
• W2063307704 hasConcept C104779481 @default.
• W2063307704 hasConcept C107365816 @default.
• W2063307704 hasConcept C113196181 @default.
• W2063307704 hasConcept C123408415 @default.
• W2063307704 hasConcept C140205800 @default.
• W2063307704 hasConcept C151730666 @default.
• W2063307704 hasConcept C159985019 @default.
• W2063307704 hasConcept C161790260 @default.
• W2063307704 hasConcept C171250308 @default.
• W2063307704 hasConcept C178790620 @default.
• W2063307704 hasConcept C185592680 @default.
• W2063307704 hasConcept C19067145 @default.
• W2063307704 hasConcept C192562407 @default.
• W2063307704 hasConcept C194760766 @default.
• W2063307704 hasConcept C201931942 @default.
• W2063307704 hasConcept C22423302 @default.
• W2063307704 hasConcept C2777492770 @default.
• W2063307704 hasConcept C2779227376 @default.
• W2063307704 hasConcept C2816523 @default.
• W2063307704 hasConcept C56052488 @default.
• W2063307704 hasConcept C61427134 @default.
• W2063307704 hasConcept C64297162 @default.
• W2063307704 hasConcept C65165184 @default.
• W2063307704 hasConcept C8010536 @default.
• W2063307704 hasConcept C86803240 @default.
• W2063307704 hasConceptScore W2063307704C104779481 @default.
• W2063307704 hasConceptScore W2063307704C107365816 @default.
• W2063307704 hasConceptScore W2063307704C113196181 @default.
• W2063307704 hasConceptScore W2063307704C123408415 @default.
• W2063307704 hasConceptScore W2063307704C140205800 @default.
• W2063307704 hasConceptScore W2063307704C151730666 @default.
• W2063307704 hasConceptScore W2063307704C159985019 @default.
• W2063307704 hasConceptScore W2063307704C161790260 @default.
• W2063307704 hasConceptScore W2063307704C171250308 @default.
• W2063307704 hasConceptScore W2063307704C178790620 @default.
• W2063307704 hasConceptScore W2063307704C185592680 @default.
• W2063307704 hasConceptScore W2063307704C19067145 @default.
• W2063307704 hasConceptScore W2063307704C192562407 @default.
• W2063307704 hasConceptScore W2063307704C194760766 @default.
• W2063307704 hasConceptScore W2063307704C201931942 @default.
• W2063307704 hasConceptScore W2063307704C22423302 @default.
• W2063307704 hasConceptScore W2063307704C2777492770 @default.
• W2063307704 hasConceptScore W2063307704C2779227376 @default.
• W2063307704 hasConceptScore W2063307704C2816523 @default.
• W2063307704 hasConceptScore W2063307704C56052488 @default.
• W2063307704 hasConceptScore W2063307704C61427134 @default.
• W2063307704 hasConceptScore W2063307704C64297162 @default.
• W2063307704 hasConceptScore W2063307704C65165184 @default.
• W2063307704 hasConceptScore W2063307704C8010536 @default.
• W2063307704 hasConceptScore W2063307704C86803240 @default.
• W2063307704 hasIssue "1-4" @default.
• W2063307704 hasLocation W20633077041 @default.
• W2063307704 hasOpenAccess W2063307704 @default.
• W2063307704 hasPrimaryLocation W20633077041 @default.
• W2063307704 hasRelatedWork W1974226862 @default.
• W2063307704 hasRelatedWork W1998312223 @default.
• W2063307704 hasRelatedWork W2001818127 @default.
• W2063307704 hasRelatedWork W2010079571 @default.
• W2063307704 hasRelatedWork W2069240814 @default.
• W2063307704 hasRelatedWork W2077118741 @default.
• W2063307704 hasRelatedWork W2361873638 @default.
• W2063307704 hasRelatedWork W2364045966 @default.
• W2063307704 hasRelatedWork W2372064321 @default.

• next