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- W2063373208 abstract "The ion microprobe mass analyzer accomplishes the chemical analysis of a microvolume of a solid sample by sputtering ions from its surface with a high-energy beam of bombarding ions. The relative sputtered ion yields of many different elements and compounds have been studied as a function of the chemical species of the bombarding beam. It is observed that when the bombarding beam is composed of an inert gas the positive sputtered ion yield of metals typically decays with time of bombardment. It is further observed that the sputtered ion yield can be maintained at a high stable level by bombarding with one of the reactive, electronegative gases. It is also observed that the sputtered ion yield is simply and reproducibly related to the sputtered atom yield when bombarding with reactive gases." @default.
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- W2063373208 date "1969-01-01" @default.
- W2063373208 modified "2023-09-24" @default.
- W2063373208 title "Progress in analytic methods for the ion microprobe mass analyzer" @default.
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- W2063373208 doi "https://doi.org/10.1016/0020-7381(69)80006-9" @default.
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