Matches in SemOpenAlex for { <https://semopenalex.org/work/W2063467029> ?p ?o ?g. }
Showing items 1 to 80 of
80
with 100 items per page.
- W2063467029 abstract "This study described a novel and original method of ultra-shallow fluorine and nitrogen implantation from radio frequency (RF = 13,56MHz) CF4 and NH3 plasmas, performed in classical RIE / PECVD reactors. The performed experiments indicate that ultra-shallow implantation of high concentration of fluorine and nitrogen ions by using r.f. plasma reactors (PECVD ad RIE) is feasible. It is also possible to control the implantation process parameters, ie implantation depth and maximum concentration, by controlling the parameters of the plasma processes. Electrical characterization of MOS structures with HfO2 layer as a gate dielectric, shows that samples implanted with nitrogen, have the best insulating properties, better even the reference sample. Samples prepared by fluorine implantation, exhibit much worse I-V behavior for low, medium and high electric fields, than all samples studied in this article. This samples exhibit the highest leakage currents, too." @default.
- W2063467029 created "2016-06-24" @default.
- W2063467029 creator A5027816382 @default.
- W2063467029 creator A5032210508 @default.
- W2063467029 creator A5075445141 @default.
- W2063467029 date "2013-07-25" @default.
- W2063467029 modified "2023-09-23" @default.
- W2063467029 title "Ultra-shallow fluorine and nitrogen implantation from r.f. plasma and its effect on electro-physical parameters of Al/HfO2/Si MOS structures" @default.
- W2063467029 cites W1486788911 @default.
- W2063467029 cites W1983878446 @default.
- W2063467029 cites W1995226797 @default.
- W2063467029 cites W2015273683 @default.
- W2063467029 cites W2052182703 @default.
- W2063467029 cites W2058164609 @default.
- W2063467029 cites W2069996252 @default.
- W2063467029 cites W2079381324 @default.
- W2063467029 cites W2091788704 @default.
- W2063467029 cites W2107621381 @default.
- W2063467029 cites W2329837736 @default.
- W2063467029 cites W2470282387 @default.
- W2063467029 doi "https://doi.org/10.1117/12.2030304" @default.
- W2063467029 hasPublicationYear "2013" @default.
- W2063467029 type Work @default.
- W2063467029 sameAs 2063467029 @default.
- W2063467029 citedByCount "0" @default.
- W2063467029 crossrefType "proceedings-article" @default.
- W2063467029 hasAuthorship W2063467029A5027816382 @default.
- W2063467029 hasAuthorship W2063467029A5032210508 @default.
- W2063467029 hasAuthorship W2063467029A5075445141 @default.
- W2063467029 hasConcept C107872376 @default.
- W2063467029 hasConcept C113196181 @default.
- W2063467029 hasConcept C121332964 @default.
- W2063467029 hasConcept C133386390 @default.
- W2063467029 hasConcept C145148216 @default.
- W2063467029 hasConcept C178790620 @default.
- W2063467029 hasConcept C185592680 @default.
- W2063467029 hasConcept C191897082 @default.
- W2063467029 hasConcept C192562407 @default.
- W2063467029 hasConcept C38347018 @default.
- W2063467029 hasConcept C41823505 @default.
- W2063467029 hasConcept C49040817 @default.
- W2063467029 hasConcept C506198293 @default.
- W2063467029 hasConcept C537208039 @default.
- W2063467029 hasConcept C544956773 @default.
- W2063467029 hasConcept C62520636 @default.
- W2063467029 hasConcept C82706917 @default.
- W2063467029 hasConceptScore W2063467029C107872376 @default.
- W2063467029 hasConceptScore W2063467029C113196181 @default.
- W2063467029 hasConceptScore W2063467029C121332964 @default.
- W2063467029 hasConceptScore W2063467029C133386390 @default.
- W2063467029 hasConceptScore W2063467029C145148216 @default.
- W2063467029 hasConceptScore W2063467029C178790620 @default.
- W2063467029 hasConceptScore W2063467029C185592680 @default.
- W2063467029 hasConceptScore W2063467029C191897082 @default.
- W2063467029 hasConceptScore W2063467029C192562407 @default.
- W2063467029 hasConceptScore W2063467029C38347018 @default.
- W2063467029 hasConceptScore W2063467029C41823505 @default.
- W2063467029 hasConceptScore W2063467029C49040817 @default.
- W2063467029 hasConceptScore W2063467029C506198293 @default.
- W2063467029 hasConceptScore W2063467029C537208039 @default.
- W2063467029 hasConceptScore W2063467029C544956773 @default.
- W2063467029 hasConceptScore W2063467029C62520636 @default.
- W2063467029 hasConceptScore W2063467029C82706917 @default.
- W2063467029 hasLocation W20634670291 @default.
- W2063467029 hasOpenAccess W2063467029 @default.
- W2063467029 hasPrimaryLocation W20634670291 @default.
- W2063467029 hasRelatedWork W2005161516 @default.
- W2063467029 hasRelatedWork W2028586932 @default.
- W2063467029 hasRelatedWork W2047145346 @default.
- W2063467029 hasRelatedWork W2063190395 @default.
- W2063467029 hasRelatedWork W2063467029 @default.
- W2063467029 hasRelatedWork W2068956941 @default.
- W2063467029 hasRelatedWork W2073067861 @default.
- W2063467029 hasRelatedWork W2086365993 @default.
- W2063467029 hasRelatedWork W3101130858 @default.
- W2063467029 hasRelatedWork W3112582540 @default.
- W2063467029 isParatext "false" @default.
- W2063467029 isRetracted "false" @default.
- W2063467029 magId "2063467029" @default.
- W2063467029 workType "article" @default.