Matches in SemOpenAlex for { <https://semopenalex.org/work/W2063501844> ?p ?o ?g. }
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- W2063501844 endingPage "90" @default.
- W2063501844 startingPage "85" @default.
- W2063501844 abstract "A novel technique has been developed to fabricate surface-relief gratings using photosensitive gel films. Gel films which were derived from metal-alkoxides chemically modified with β-diketones were photosensitive owing to remaining chelate rings; the UV-irradiation of these gel films substantially decreased their solubility in acidic aqueous solutions or organic solvents. Leaching of the gel films after UV-irradiation through a mask and subsequent heat-treatment gave negative patterns of the mask used. Fine-patterns of PLZT films, as well as Al2O3, ZrO2, and TiO2 films, were successfully formed by the above process. Utilizing this process, surface-relief gratings were fabricated on silica glass and Si substrates by the irradiation of the modified gel films with a XeF excimer laser through a phase mask. Very uniform diffraction gratings with a pitch of about 1.0 μm were produced for Al2O3, ZrO2, and TiO2 films, along with PLZT films. The morphology and diffraction efficiency of the gratings obtained were examined in terms of fabrication conditions." @default.
- W2063501844 created "2016-06-24" @default.
- W2063501844 creator A5011021548 @default.
- W2063501844 creator A5045721031 @default.
- W2063501844 creator A5074467559 @default.
- W2063501844 date "1999-08-01" @default.
- W2063501844 modified "2023-09-26" @default.
- W2063501844 title "Photosensitive gel films prepared by the chemical modification and their application to surface-relief gratings" @default.
- W2063501844 cites W1972282404 @default.
- W2063501844 cites W1982470598 @default.
- W2063501844 cites W2029509833 @default.
- W2063501844 cites W2032571515 @default.
- W2063501844 cites W2060424757 @default.
- W2063501844 cites W2063871481 @default.
- W2063501844 cites W2072057328 @default.
- W2063501844 cites W2074220520 @default.
- W2063501844 doi "https://doi.org/10.1016/s0040-6090(99)00082-6" @default.
- W2063501844 hasPublicationYear "1999" @default.
- W2063501844 type Work @default.
- W2063501844 sameAs 2063501844 @default.
- W2063501844 citedByCount "48" @default.
- W2063501844 countsByYear W20635018442012 @default.
- W2063501844 countsByYear W20635018442013 @default.
- W2063501844 countsByYear W20635018442014 @default.
- W2063501844 countsByYear W20635018442015 @default.
- W2063501844 countsByYear W20635018442016 @default.
- W2063501844 countsByYear W20635018442017 @default.
- W2063501844 countsByYear W20635018442018 @default.
- W2063501844 countsByYear W20635018442019 @default.
- W2063501844 crossrefType "journal-article" @default.
- W2063501844 hasAuthorship W2063501844A5011021548 @default.
- W2063501844 hasAuthorship W2063501844A5045721031 @default.
- W2063501844 hasAuthorship W2063501844A5074467559 @default.
- W2063501844 hasConcept C111337013 @default.
- W2063501844 hasConcept C120665830 @default.
- W2063501844 hasConcept C121332964 @default.
- W2063501844 hasConcept C127413603 @default.
- W2063501844 hasConcept C136525101 @default.
- W2063501844 hasConcept C142724271 @default.
- W2063501844 hasConcept C171250308 @default.
- W2063501844 hasConcept C178790620 @default.
- W2063501844 hasConcept C185544564 @default.
- W2063501844 hasConcept C185592680 @default.
- W2063501844 hasConcept C19067145 @default.
- W2063501844 hasConcept C192562407 @default.
- W2063501844 hasConcept C204787440 @default.
- W2063501844 hasConcept C207114421 @default.
- W2063501844 hasConcept C2780477314 @default.
- W2063501844 hasConcept C38398224 @default.
- W2063501844 hasConcept C42360764 @default.
- W2063501844 hasConcept C44280652 @default.
- W2063501844 hasConcept C520434653 @default.
- W2063501844 hasConcept C71924100 @default.
- W2063501844 hasConceptScore W2063501844C111337013 @default.
- W2063501844 hasConceptScore W2063501844C120665830 @default.
- W2063501844 hasConceptScore W2063501844C121332964 @default.
- W2063501844 hasConceptScore W2063501844C127413603 @default.
- W2063501844 hasConceptScore W2063501844C136525101 @default.
- W2063501844 hasConceptScore W2063501844C142724271 @default.
- W2063501844 hasConceptScore W2063501844C171250308 @default.
- W2063501844 hasConceptScore W2063501844C178790620 @default.
- W2063501844 hasConceptScore W2063501844C185544564 @default.
- W2063501844 hasConceptScore W2063501844C185592680 @default.
- W2063501844 hasConceptScore W2063501844C19067145 @default.
- W2063501844 hasConceptScore W2063501844C192562407 @default.
- W2063501844 hasConceptScore W2063501844C204787440 @default.
- W2063501844 hasConceptScore W2063501844C207114421 @default.
- W2063501844 hasConceptScore W2063501844C2780477314 @default.
- W2063501844 hasConceptScore W2063501844C38398224 @default.
- W2063501844 hasConceptScore W2063501844C42360764 @default.
- W2063501844 hasConceptScore W2063501844C44280652 @default.
- W2063501844 hasConceptScore W2063501844C520434653 @default.
- W2063501844 hasConceptScore W2063501844C71924100 @default.
- W2063501844 hasFunder F4320320912 @default.
- W2063501844 hasIssue "1-2" @default.
- W2063501844 hasLocation W20635018441 @default.
- W2063501844 hasOpenAccess W2063501844 @default.
- W2063501844 hasPrimaryLocation W20635018441 @default.
- W2063501844 hasRelatedWork W1982708586 @default.
- W2063501844 hasRelatedWork W2005859794 @default.
- W2063501844 hasRelatedWork W2023806671 @default.
- W2063501844 hasRelatedWork W2067393306 @default.
- W2063501844 hasRelatedWork W2091822988 @default.
- W2063501844 hasRelatedWork W2119161493 @default.
- W2063501844 hasRelatedWork W2390863184 @default.
- W2063501844 hasRelatedWork W2505733790 @default.
- W2063501844 hasRelatedWork W3204749931 @default.
- W2063501844 hasRelatedWork W4292232851 @default.
- W2063501844 hasVolume "351" @default.
- W2063501844 isParatext "false" @default.
- W2063501844 isRetracted "false" @default.
- W2063501844 magId "2063501844" @default.
- W2063501844 workType "article" @default.