Matches in SemOpenAlex for { <https://semopenalex.org/work/W2063564975> ?p ?o ?g. }
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98
with 100 items per page.
- W2063564975 endingPage "367" @default.
- W2063564975 startingPage "359" @default.
- W2063564975 abstract "The effect of rapid thermal annealing (1073–1473 K) in vacuum on thin (11 nm) thermal SiO2 layers on Si has been studied by means of X-ray photoelectron spectroscopy. The results show that the RTA slightly affects the properties of the SiSiO2 system up to a temperature of 1473 K and the effect is in the direction of obtaining a more perfect oxide structure. The stoichiometry of the layer, however, at the surface as well as in the bulk is not influenced by the annealing. The analysis of the data also shows that the spontaneous decomposition of the oxide and the pinholes formation most likely take place during the annealing at 1473 K. The results seem to rule out the formation of suboxides at this temperature." @default.
- W2063564975 created "2016-06-24" @default.
- W2063564975 creator A5012858693 @default.
- W2063564975 creator A5022403657 @default.
- W2063564975 date "1996-12-01" @default.
- W2063564975 modified "2023-10-04" @default.
- W2063564975 title "Influence of the rapid thermal annealing in vacuum on the XPS characteristics of thin SiO2" @default.
- W2063564975 cites W1671323197 @default.
- W2063564975 cites W1971240421 @default.
- W2063564975 cites W1988844986 @default.
- W2063564975 cites W1992784664 @default.
- W2063564975 cites W1995087308 @default.
- W2063564975 cites W2018669359 @default.
- W2063564975 cites W2023789056 @default.
- W2063564975 cites W2036390981 @default.
- W2063564975 cites W2039153583 @default.
- W2063564975 cites W2044139252 @default.
- W2063564975 cites W2069654218 @default.
- W2063564975 cites W2077761816 @default.
- W2063564975 cites W2087868065 @default.
- W2063564975 cites W2088924522 @default.
- W2063564975 cites W2091260973 @default.
- W2063564975 cites W2093472005 @default.
- W2063564975 cites W2108666737 @default.
- W2063564975 cites W2135320183 @default.
- W2063564975 cites W2141790332 @default.
- W2063564975 cites W2273886880 @default.
- W2063564975 doi "https://doi.org/10.1016/s0169-4332(96)00556-9" @default.
- W2063564975 hasPublicationYear "1996" @default.
- W2063564975 type Work @default.
- W2063564975 sameAs 2063564975 @default.
- W2063564975 citedByCount "5" @default.
- W2063564975 countsByYear W20635649752021 @default.
- W2063564975 countsByYear W20635649752022 @default.
- W2063564975 crossrefType "journal-article" @default.
- W2063564975 hasAuthorship W2063564975A5012858693 @default.
- W2063564975 hasAuthorship W2063564975A5022403657 @default.
- W2063564975 hasConcept C113196181 @default.
- W2063564975 hasConcept C121332964 @default.
- W2063564975 hasConcept C127413603 @default.
- W2063564975 hasConcept C144082473 @default.
- W2063564975 hasConcept C147789679 @default.
- W2063564975 hasConcept C160434732 @default.
- W2063564975 hasConcept C171250308 @default.
- W2063564975 hasConcept C175708663 @default.
- W2063564975 hasConcept C178790620 @default.
- W2063564975 hasConcept C185592680 @default.
- W2063564975 hasConcept C19067145 @default.
- W2063564975 hasConcept C191897082 @default.
- W2063564975 hasConcept C192562407 @default.
- W2063564975 hasConcept C204530211 @default.
- W2063564975 hasConcept C2777855556 @default.
- W2063564975 hasConcept C2779851234 @default.
- W2063564975 hasConcept C42360764 @default.
- W2063564975 hasConcept C43617362 @default.
- W2063564975 hasConcept C82225425 @default.
- W2063564975 hasConcept C97355855 @default.
- W2063564975 hasConceptScore W2063564975C113196181 @default.
- W2063564975 hasConceptScore W2063564975C121332964 @default.
- W2063564975 hasConceptScore W2063564975C127413603 @default.
- W2063564975 hasConceptScore W2063564975C144082473 @default.
- W2063564975 hasConceptScore W2063564975C147789679 @default.
- W2063564975 hasConceptScore W2063564975C160434732 @default.
- W2063564975 hasConceptScore W2063564975C171250308 @default.
- W2063564975 hasConceptScore W2063564975C175708663 @default.
- W2063564975 hasConceptScore W2063564975C178790620 @default.
- W2063564975 hasConceptScore W2063564975C185592680 @default.
- W2063564975 hasConceptScore W2063564975C19067145 @default.
- W2063564975 hasConceptScore W2063564975C191897082 @default.
- W2063564975 hasConceptScore W2063564975C192562407 @default.
- W2063564975 hasConceptScore W2063564975C204530211 @default.
- W2063564975 hasConceptScore W2063564975C2777855556 @default.
- W2063564975 hasConceptScore W2063564975C2779851234 @default.
- W2063564975 hasConceptScore W2063564975C42360764 @default.
- W2063564975 hasConceptScore W2063564975C43617362 @default.
- W2063564975 hasConceptScore W2063564975C82225425 @default.
- W2063564975 hasConceptScore W2063564975C97355855 @default.
- W2063564975 hasIssue "4" @default.
- W2063564975 hasLocation W20635649751 @default.
- W2063564975 hasOpenAccess W2063564975 @default.
- W2063564975 hasPrimaryLocation W20635649751 @default.
- W2063564975 hasRelatedWork W1969905112 @default.
- W2063564975 hasRelatedWork W1982933493 @default.
- W2063564975 hasRelatedWork W1985064754 @default.
- W2063564975 hasRelatedWork W2068126508 @default.
- W2063564975 hasRelatedWork W2070716949 @default.
- W2063564975 hasRelatedWork W2076904436 @default.
- W2063564975 hasRelatedWork W2082671129 @default.
- W2063564975 hasRelatedWork W2150998405 @default.
- W2063564975 hasRelatedWork W2273075497 @default.
- W2063564975 hasRelatedWork W2790297317 @default.
- W2063564975 hasVolume "103" @default.
- W2063564975 isParatext "false" @default.
- W2063564975 isRetracted "false" @default.
- W2063564975 magId "2063564975" @default.
- W2063564975 workType "article" @default.