Matches in SemOpenAlex for { <https://semopenalex.org/work/W2063651644> ?p ?o ?g. }
- W2063651644 endingPage "218" @default.
- W2063651644 startingPage "205" @default.
- W2063651644 abstract "Abstract The present state of the art of secondary ion mass spectrometry (SIMS), applied to the in-depth analysis of impurity concentration profiles, is reviewed critically. It is shown that SIMS has reached a level of perfection which is unparalleled by other analytical techniques. There are, however, several effects which may cause deviations of the measured profile from the original dopant distribution. These detrimental effects are due to interaction of primary ions with the residual gas, adsorption and incorporation of residual gases, sputtering yield variations due to the accumulation of probe atoms in the sample, mass interference between molecular ions and the atomic species under study and, last but not least, beam-induced relocation of dopant atoms (“atomic mixing”). Methods for minimizing the respective disturbing effect are discussed." @default.
- W2063651644 created "2016-06-24" @default.
- W2063651644 creator A5013412968 @default.
- W2063651644 date "1982-01-01" @default.
- W2063651644 modified "2023-09-23" @default.
- W2063651644 title "Depth profiling by means of sims: Recent progress and current problems" @default.
- W2063651644 cites W122199711 @default.
- W2063651644 cites W1537896675 @default.
- W2063651644 cites W1964417432 @default.
- W2063651644 cites W1965122521 @default.
- W2063651644 cites W1965284415 @default.
- W2063651644 cites W1965578575 @default.
- W2063651644 cites W1969150987 @default.
- W2063651644 cites W1971759573 @default.
- W2063651644 cites W1971833872 @default.
- W2063651644 cites W1973669402 @default.
- W2063651644 cites W1975688204 @default.
- W2063651644 cites W1983934054 @default.
- W2063651644 cites W1985908981 @default.
- W2063651644 cites W1988524201 @default.
- W2063651644 cites W1989214172 @default.
- W2063651644 cites W1990079174 @default.
- W2063651644 cites W1990257181 @default.
- W2063651644 cites W2000697844 @default.
- W2063651644 cites W2002367836 @default.
- W2063651644 cites W2006951640 @default.
- W2063651644 cites W2013232633 @default.
- W2063651644 cites W2018215215 @default.
- W2063651644 cites W2024345538 @default.
- W2063651644 cites W2026329866 @default.
- W2063651644 cites W2032556747 @default.
- W2063651644 cites W2034996430 @default.
- W2063651644 cites W2037371816 @default.
- W2063651644 cites W2039191522 @default.
- W2063651644 cites W2042825892 @default.
- W2063651644 cites W2042861858 @default.
- W2063651644 cites W2046338471 @default.
- W2063651644 cites W2046947305 @default.
- W2063651644 cites W2048510146 @default.
- W2063651644 cites W2049809768 @default.
- W2063651644 cites W2051744442 @default.
- W2063651644 cites W2060264477 @default.
- W2063651644 cites W2063373208 @default.
- W2063651644 cites W2066231294 @default.
- W2063651644 cites W2075769922 @default.
- W2063651644 cites W2081385150 @default.
- W2063651644 cites W2087827592 @default.
- W2063651644 cites W2089342246 @default.
- W2063651644 cites W2089953729 @default.
- W2063651644 cites W2093877425 @default.
- W2063651644 cites W2106018943 @default.
- W2063651644 cites W2106366646 @default.
- W2063651644 cites W2147187917 @default.
- W2063651644 cites W2157057249 @default.
- W2063651644 cites W2166515623 @default.
- W2063651644 cites W2210772560 @default.
- W2063651644 cites W249442726 @default.
- W2063651644 cites W37049629 @default.
- W2063651644 doi "https://doi.org/10.1080/00337578208222841" @default.
- W2063651644 hasPublicationYear "1982" @default.
- W2063651644 type Work @default.
- W2063651644 sameAs 2063651644 @default.
- W2063651644 citedByCount "39" @default.
- W2063651644 countsByYear W20636516442012 @default.
- W2063651644 countsByYear W20636516442013 @default.
- W2063651644 countsByYear W20636516442014 @default.
- W2063651644 crossrefType "journal-article" @default.
- W2063651644 hasAuthorship W2063651644A5013412968 @default.
- W2063651644 hasConcept C113196181 @default.
- W2063651644 hasConcept C121332964 @default.
- W2063651644 hasConcept C145148216 @default.
- W2063651644 hasConcept C162356407 @default.
- W2063651644 hasConcept C171250308 @default.
- W2063651644 hasConcept C178790620 @default.
- W2063651644 hasConcept C184779094 @default.
- W2063651644 hasConcept C185592680 @default.
- W2063651644 hasConcept C187529661 @default.
- W2063651644 hasConcept C19067145 @default.
- W2063651644 hasConcept C191952053 @default.
- W2063651644 hasConcept C192562407 @default.
- W2063651644 hasConcept C22423302 @default.
- W2063651644 hasConcept C43617362 @default.
- W2063651644 hasConcept C49040817 @default.
- W2063651644 hasConcept C57863236 @default.
- W2063651644 hasConcept C71987851 @default.
- W2063651644 hasConcept C77671233 @default.
- W2063651644 hasConceptScore W2063651644C113196181 @default.
- W2063651644 hasConceptScore W2063651644C121332964 @default.
- W2063651644 hasConceptScore W2063651644C145148216 @default.
- W2063651644 hasConceptScore W2063651644C162356407 @default.
- W2063651644 hasConceptScore W2063651644C171250308 @default.
- W2063651644 hasConceptScore W2063651644C178790620 @default.
- W2063651644 hasConceptScore W2063651644C184779094 @default.
- W2063651644 hasConceptScore W2063651644C185592680 @default.
- W2063651644 hasConceptScore W2063651644C187529661 @default.
- W2063651644 hasConceptScore W2063651644C19067145 @default.
- W2063651644 hasConceptScore W2063651644C191952053 @default.
- W2063651644 hasConceptScore W2063651644C192562407 @default.