Matches in SemOpenAlex for { <https://semopenalex.org/work/W2063705786> ?p ?o ?g. }
Showing items 1 to 58 of
58
with 100 items per page.
- W2063705786 endingPage "453" @default.
- W2063705786 startingPage "450" @default.
- W2063705786 abstract "Conformality of coatings deposited in one-side confined channels from a film-forming gas is scrutinized theoretically for viscous mode of the gas flow. The process was shown to have a universal invariant parameter, which defines conditions of similarity of channels and process regimes with respect to obtaining coatings of equal step coverage quality. Calculation was performed using numerical method to obtain the coating thickness distribution on channel walls for various parameters of deposition reaction. The model reveals increase of step coverage quality with gas pressure increase for the deposition reactions of the order between 1 and 2. Results are specifically applied to deposition of poly-p-xylylene conformal coatings and limits of their validity are shortly discussed." @default.
- W2063705786 created "2016-06-24" @default.
- W2063705786 creator A5022413403 @default.
- W2063705786 creator A5062275578 @default.
- W2063705786 date "2004-03-01" @default.
- W2063705786 modified "2023-10-16" @default.
- W2063705786 title "Thickness distribution of gas phase coatings in confined channels" @default.
- W2063705786 cites W1970361161 @default.
- W2063705786 cites W1974466475 @default.
- W2063705786 cites W1980406875 @default.
- W2063705786 cites W1981471402 @default.
- W2063705786 cites W2022408768 @default.
- W2063705786 cites W2096903456 @default.
- W2063705786 doi "https://doi.org/10.1016/j.surfcoat.2003.10.128" @default.
- W2063705786 hasPublicationYear "2004" @default.
- W2063705786 type Work @default.
- W2063705786 sameAs 2063705786 @default.
- W2063705786 citedByCount "2" @default.
- W2063705786 countsByYear W20637057862021 @default.
- W2063705786 crossrefType "journal-article" @default.
- W2063705786 hasAuthorship W2063705786A5022413403 @default.
- W2063705786 hasAuthorship W2063705786A5062275578 @default.
- W2063705786 hasConcept C110121322 @default.
- W2063705786 hasConcept C121332964 @default.
- W2063705786 hasConcept C134306372 @default.
- W2063705786 hasConcept C159985019 @default.
- W2063705786 hasConcept C192562407 @default.
- W2063705786 hasConcept C3020013744 @default.
- W2063705786 hasConcept C33923547 @default.
- W2063705786 hasConcept C97355855 @default.
- W2063705786 hasConceptScore W2063705786C110121322 @default.
- W2063705786 hasConceptScore W2063705786C121332964 @default.
- W2063705786 hasConceptScore W2063705786C134306372 @default.
- W2063705786 hasConceptScore W2063705786C159985019 @default.
- W2063705786 hasConceptScore W2063705786C192562407 @default.
- W2063705786 hasConceptScore W2063705786C3020013744 @default.
- W2063705786 hasConceptScore W2063705786C33923547 @default.
- W2063705786 hasConceptScore W2063705786C97355855 @default.
- W2063705786 hasLocation W20637057861 @default.
- W2063705786 hasOpenAccess W2063705786 @default.
- W2063705786 hasPrimaryLocation W20637057861 @default.
- W2063705786 hasRelatedWork W1994103032 @default.
- W2063705786 hasRelatedWork W2011052271 @default.
- W2063705786 hasRelatedWork W2014315543 @default.
- W2063705786 hasRelatedWork W2051270029 @default.
- W2063705786 hasRelatedWork W2082293200 @default.
- W2063705786 hasRelatedWork W2137307547 @default.
- W2063705786 hasRelatedWork W2380293314 @default.
- W2063705786 hasRelatedWork W2943188944 @default.
- W2063705786 hasRelatedWork W4285802202 @default.
- W2063705786 hasRelatedWork W4317433637 @default.
- W2063705786 hasVolume "180-181" @default.
- W2063705786 isParatext "false" @default.
- W2063705786 isRetracted "false" @default.
- W2063705786 magId "2063705786" @default.
- W2063705786 workType "article" @default.